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nist-gov/www.nist.gov/cnst/equipment
Scott Williams 4063bef310 Initital commit.
2025-03-05 18:59:57 +00:00

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<!DOCTYPE html>
<html lang="en" dir="ltr" prefix="content: http://purl.org/rss/1.0/modules/content/ dc: http://purl.org/dc/terms/ foaf: http://xmlns.com/foaf/0.1/ og: http://ogp.me/ns# rdfs: http://www.w3.org/2000/01/rdf-schema# schema: http://schema.org/ sioc: http://rdfs.org/sioc/ns# sioct: http://rdfs.org/sioc/types# skos: http://www.w3.org/2004/02/skos/core# xsd: http://www.w3.org/2001/XMLSchema# ">
<head>
<meta charset="utf-8" /><script type="text/javascript">(window.NREUM||(NREUM={})).init={ajax:{deny_list:["bam.nr-data.net"]}};(window.NREUM||(NREUM={})).loader_config={licenseKey:"37b7ccb661",applicationID:"1089704227"};;/*! For license information please see nr-loader-rum-1.283.2.min.js.LICENSE.txt */
(()=>{var e,t,r={122:(e,t,r)=>{"use strict";r.d(t,{a:()=>i});var n=r(944);function i(e,t){try{if(!e||"object"!=typeof e)return(0,n.R)(3);if(!t||"object"!=typeof t)return(0,n.R)(4);const r=Object.create(Object.getPrototypeOf(t),Object.getOwnPropertyDescriptors(t)),o=0===Object.keys(r).length?e:r;for(let a in o)if(void 0!==e[a])try{if(null===e[a]){r[a]=null;continue}Array.isArray(e[a])&&Array.isArray(t[a])?r[a]=Array.from(new Set([...e[a],...t[a]])):"object"==typeof e[a]&&"object"==typeof t[a]?r[a]=i(e[a],t[a]):r[a]=e[a]}catch(e){(0,n.R)(1,e)}return r}catch(e){(0,n.R)(2,e)}}},555:(e,t,r)=>{"use strict";r.d(t,{Vp:()=>c,fn:()=>s,x1:()=>u});var n=r(384),i=r(122);const o={beacon:n.NT.beacon,errorBeacon:n.NT.errorBeacon,licenseKey:void 0,applicationID:void 0,sa:void 0,queueTime:void 0,applicationTime:void 0,ttGuid:void 0,user:void 0,account:void 0,product:void 0,extra:void 0,jsAttributes:{},userAttributes:void 0,atts:void 0,transactionName:void 0,tNamePlain:void 0},a={};function s(e){try{const t=c(e);return!!t.licenseKey&&!!t.errorBeacon&&!!t.applicationID}catch(e){return!1}}function c(e){if(!e)throw new Error("All info objects require an agent identifier!");if(!a[e])throw new Error("Info for ".concat(e," was never set"));return a[e]}function u(e,t){if(!e)throw new Error("All info objects require an agent identifier!");a[e]=(0,i.a)(t,o);const r=(0,n.nY)(e);r&&(r.info=a[e])}},217:(e,t,r)=>{"use strict";r.d(t,{D0:()=>m,gD:()=>v,xN:()=>h});r(860).K7.genericEvents;const n="experimental.marks",i="experimental.measures",o="experimental.resources",a=e=>{if(!e||"string"!=typeof e)return!1;try{document.createDocumentFragment().querySelector(e)}catch{return!1}return!0};var s=r(614),c=r(944),u=r(384),l=r(122);const d="[data-nr-mask]",f=()=>{const e={feature_flags:[],experimental:{marks:!1,measures:!1,resources:!1},mask_selector:"*",block_selector:"[data-nr-block]",mask_input_options:{color:!1,date:!1,"datetime-local":!1,email:!1,month:!1,number:!1,range:!1,search:!1,tel:!1,text:!1,time:!1,url:!1,week:!1,textarea:!1,select:!1,password:!0}};return{ajax:{deny_list:void 0,block_internal:!0,enabled:!0,autoStart:!0},distributed_tracing:{enabled:void 0,exclude_newrelic_header:void 0,cors_use_newrelic_header:void 0,cors_use_tracecontext_headers:void 0,allowed_origins:void 0},get feature_flags(){return e.feature_flags},set feature_flags(t){e.feature_flags=t},generic_events:{enabled:!0,autoStart:!0},harvest:{interval:30},jserrors:{enabled:!0,autoStart:!0},logging:{enabled:!0,autoStart:!0},metrics:{enabled:!0,autoStart:!0},obfuscate:void 0,page_action:{enabled:!0},page_view_event:{enabled:!0,autoStart:!0},page_view_timing:{enabled:!0,autoStart:!0},performance:{get capture_marks(){return e.feature_flags.includes(n)||e.experimental.marks},set capture_marks(t){e.experimental.marks=t},get capture_measures(){return e.feature_flags.includes(i)||e.experimental.measures},set capture_measures(t){e.experimental.measures=t},capture_detail:!0,resources:{get enabled(){return e.feature_flags.includes(o)||e.experimental.resources},set enabled(t){e.experimental.resources=t},asset_types:[],first_party_domains:[],ignore_newrelic:!0}},privacy:{cookies_enabled:!0},proxy:{assets:void 0,beacon:void 0},session:{expiresMs:s.wk,inactiveMs:s.BB},session_replay:{autoStart:!0,enabled:!1,preload:!1,sampling_rate:10,error_sampling_rate:100,collect_fonts:!1,inline_images:!1,fix_stylesheets:!0,mask_all_inputs:!0,get mask_text_selector(){return e.mask_selector},set mask_text_selector(t){a(t)?e.mask_selector="".concat(t,",").concat(d):""===t||null===t?e.mask_selector=d:(0,c.R)(5,t)},get block_class(){return"nr-block"},get ignore_class(){return"nr-ignore"},get mask_text_class(){return"nr-mask"},get block_selector(){return e.block_selector},set block_selector(t){a(t)?e.block_selector+=",".concat(t):""!==t&&(0,c.R)(6,t)},get mask_input_options(){return e.mask_input_options},set mask_input_options(t){t&&"object"==typeof t?e.mask_input_options={...t,password:!0}:(0,c.R)(7,t)}},session_trace:{enabled:!0,autoStart:!0},soft_navigations:{enabled:!0,autoStart:!0},spa:{enabled:!0,autoStart:!0},ssl:void 0,user_actions:{enabled:!0,elementAttributes:["id","className","tagName","type"]}}},g={},p="All configuration objects require an agent identifier!";function m(e){if(!e)throw new Error(p);if(!g[e])throw new Error("Configuration for ".concat(e," was never set"));return g[e]}function h(e,t){if(!e)throw new Error(p);g[e]=(0,l.a)(t,f());const r=(0,u.nY)(e);r&&(r.init=g[e])}function v(e,t){if(!e)throw new Error(p);var r=m(e);if(r){for(var n=t.split("."),i=0;i<n.length-1;i++)if("object"!=typeof(r=r[n[i]]))return;r=r[n[n.length-1]]}return r}},371:(e,t,r)=>{"use strict";r.d(t,{V:()=>f,f:()=>d});var n=r(122),i=r(384),o=r(154),a=r(324);let s=0;const c={buildEnv:a.F3,distMethod:a.Xs,version:a.xv,originTime:o.WN},u={customTransaction:void 0,disabled:!1,isolatedBacklog:!1,loaderType:void 0,maxBytes:3e4,onerror:void 0,ptid:void 0,releaseIds:{},appMetadata:{},session:void 0,denyList:void 0,timeKeeper:void 0,obfuscator:void 0,harvester:void 0},l={};function d(e){if(!e)throw new Error("All runtime objects require an agent identifier!");if(!l[e])throw new Error("Runtime for ".concat(e," was never set"));return l[e]}function f(e,t){if(!e)throw new Error("All runtime objects require an agent identifier!");l[e]={...(0,n.a)(t,u),...c},Object.hasOwnProperty.call(l[e],"harvestCount")||Object.defineProperty(l[e],"harvestCount",{get:()=>++s});const r=(0,i.nY)(e);r&&(r.runtime=l[e])}},324:(e,t,r)=>{"use strict";r.d(t,{F3:()=>i,Xs:()=>o,xv:()=>n});const n="1.283.2",i="PROD",o="CDN"},154:(e,t,r)=>{"use strict";r.d(t,{OF:()=>c,RI:()=>i,WN:()=>l,bv:()=>o,gm:()=>a,mw:()=>s,sb:()=>u});var n=r(863);const i="undefined"!=typeof window&&!!window.document,o="undefined"!=typeof WorkerGlobalScope&&("undefined"!=typeof self&&self instanceof WorkerGlobalScope&&self.navigator instanceof WorkerNavigator||"undefined"!=typeof globalThis&&globalThis instanceof WorkerGlobalScope&&globalThis.navigator instanceof WorkerNavigator),a=i?window:"undefined"!=typeof WorkerGlobalScope&&("undefined"!=typeof self&&self instanceof WorkerGlobalScope&&self||"undefined"!=typeof globalThis&&globalThis instanceof WorkerGlobalScope&&globalThis),s=Boolean("hidden"===a?.document?.visibilityState),c=/iPad|iPhone|iPod/.test(a.navigator?.userAgent),u=c&&"undefined"==typeof SharedWorker,l=((()=>{const e=a.navigator?.userAgent?.match(/Firefox[/\s](\d+\.\d+)/);Array.isArray(e)&&e.length>=2&&e[1]})(),Date.now()-(0,n.t)())},687:(e,t,r)=>{"use strict";r.d(t,{Ak:()=>c,Ze:()=>d,x3:()=>u});var n=r(836),i=r(606),o=r(860),a=r(646);const s={};function c(e,t){const r={staged:!1,priority:o.P3[t]||0};l(e),s[e].get(t)||s[e].set(t,r)}function u(e,t){e&&s[e]&&(s[e].get(t)&&s[e].delete(t),g(e,t,!1),s[e].size&&f(e))}function l(e){if(!e)throw new Error("agentIdentifier required");s[e]||(s[e]=new Map)}function d(e="",t="feature",r=!1){if(l(e),!e||!s[e].get(t)||r)return g(e,t);s[e].get(t).staged=!0,f(e)}function f(e){const t=Array.from(s[e]);t.every((([e,t])=>t.staged))&&(t.sort(((e,t)=>e[1].priority-t[1].priority)),t.forEach((([t])=>{s[e].delete(t),g(e,t)})))}function g(e,t,r=!0){const o=e?n.ee.get(e):n.ee,s=i.i.handlers;if(!o.aborted&&o.backlog&&s){if(r){const e=o.backlog[t],r=s[t];if(r){for(let t=0;e&&t<e.length;++t)p(e[t],r);Object.entries(r).forEach((([e,t])=>{Object.values(t||{}).forEach((t=>{t[0]?.on&&t[0]?.context()instanceof a.y&&t[0].on(e,t[1])}))}))}}o.isolatedBacklog||delete s[t],o.backlog[t]=null,o.emit("drain-"+t,[])}}function p(e,t){var r=e[1];Object.values(t[r]||{}).forEach((t=>{var r=e[0];if(t[0]===r){var n=t[1],i=e[3],o=e[2];n.apply(i,o)}}))}},836:(e,t,r)=>{"use strict";r.d(t,{P:()=>c,ee:()=>u});var n=r(384),i=r(990),o=r(371),a=r(646),s=r(607);const c="nr@context:".concat(s.W),u=function e(t,r){var n={},s={},l={},d=!1;try{d=16===r.length&&(0,o.f)(r).isolatedBacklog}catch(e){}var f={on:p,addEventListener:p,removeEventListener:function(e,t){var r=n[e];if(!r)return;for(var i=0;i<r.length;i++)r[i]===t&&r.splice(i,1)},emit:function(e,r,n,i,o){!1!==o&&(o=!0);if(u.aborted&&!i)return;t&&o&&t.emit(e,r,n);for(var a=g(n),c=m(e),l=c.length,d=0;d<l;d++)c[d].apply(a,r);var p=v()[s[e]];p&&p.push([f,e,r,a]);return a},get:h,listeners:m,context:g,buffer:function(e,t){const r=v();if(t=t||"feature",f.aborted)return;Object.entries(e||{}).forEach((([e,n])=>{s[n]=t,t in r||(r[t]=[])}))},abort:function(){f._aborted=!0,Object.keys(f.backlog).forEach((e=>{delete f.backlog[e]}))},isBuffering:function(e){return!!v()[s[e]]},debugId:r,backlog:d?{}:t&&"object"==typeof t.backlog?t.backlog:{},isolatedBacklog:d};return Object.defineProperty(f,"aborted",{get:()=>{let e=f._aborted||!1;return e||(t&&(e=t.aborted),e)}}),f;function g(e){return e&&e instanceof a.y?e:e?(0,i.I)(e,c,(()=>new a.y(c))):new a.y(c)}function p(e,t){n[e]=m(e).concat(t)}function m(e){return n[e]||[]}function h(t){return l[t]=l[t]||e(f,t)}function v(){return f.backlog}}(void 0,"globalEE"),l=(0,n.Zm)();l.ee||(l.ee=u)},646:(e,t,r)=>{"use strict";r.d(t,{y:()=>n});class n{constructor(e){this.contextId=e}}},908:(e,t,r)=>{"use strict";r.d(t,{d:()=>n,p:()=>i});var n=r(836).ee.get("handle");function i(e,t,r,i,o){o?(o.buffer([e],i),o.emit(e,t,r)):(n.buffer([e],i),n.emit(e,t,r))}},606:(e,t,r)=>{"use strict";r.d(t,{i:()=>o});var n=r(908);o.on=a;var i=o.handlers={};function o(e,t,r,o){a(o||n.d,i,e,t,r)}function a(e,t,r,i,o){o||(o="feature"),e||(e=n.d);var a=t[o]=t[o]||{};(a[r]=a[r]||[]).push([e,i])}},878:(e,t,r)=>{"use strict";function n(e,t){return{capture:e,passive:!1,signal:t}}function i(e,t,r=!1,i){window.addEventListener(e,t,n(r,i))}function o(e,t,r=!1,i){document.addEventListener(e,t,n(r,i))}r.d(t,{DD:()=>o,jT:()=>n,sp:()=>i})},607:(e,t,r)=>{"use strict";r.d(t,{W:()=>n});const n=(0,r(566).bz)()},566:(e,t,r)=>{"use strict";r.d(t,{LA:()=>s,bz:()=>a});var n=r(154);const i="xxxxxxxx-xxxx-4xxx-yxxx-xxxxxxxxxxxx";function o(e,t){return e?15&e[t]:16*Math.random()|0}function a(){const e=n.gm?.crypto||n.gm?.msCrypto;let t,r=0;return e&&e.getRandomValues&&(t=e.getRandomValues(new Uint8Array(30))),i.split("").map((e=>"x"===e?o(t,r++).toString(16):"y"===e?(3&o()|8).toString(16):e)).join("")}function s(e){const t=n.gm?.crypto||n.gm?.msCrypto;let r,i=0;t&&t.getRandomValues&&(r=t.getRandomValues(new Uint8Array(e)));const a=[];for(var s=0;s<e;s++)a.push(o(r,i++).toString(16));return a.join("")}},614:(e,t,r)=>{"use strict";r.d(t,{BB:()=>a,H3:()=>n,g:()=>u,iL:()=>c,tS:()=>s,uh:()=>i,wk:()=>o});const n="NRBA",i="SESSION",o=144e5,a=18e5,s={STARTED:"session-started",PAUSE:"session-pause",RESET:"session-reset",RESUME:"session-resume",UPDATE:"session-update"},c={SAME_TAB:"same-tab",CROSS_TAB:"cross-tab"},u={OFF:0,FULL:1,ERROR:2}},863:(e,t,r)=>{"use strict";function n(){return Math.floor(performance.now())}r.d(t,{t:()=>n})},944:(e,t,r)=>{"use strict";function n(e,t){"function"==typeof console.debug&&console.debug("New Relic Warning: https://github.com/newrelic/newrelic-browser-agent/blob/main/docs/warning-codes.md#".concat(e),t)}r.d(t,{R:()=>n})},284:(e,t,r)=>{"use strict";r.d(t,{t:()=>c,B:()=>s});var n=r(836),i=r(154);const o="newrelic";const a=new Set,s={};function c(e,t){const r=n.ee.get(t);s[t]??={},e&&"object"==typeof e&&(a.has(t)||(r.emit("rumresp",[e]),s[t]=e,a.add(t),function(e={}){try{i.gm.dispatchEvent(new CustomEvent(o,{detail:e}))}catch(e){}}({loaded:!0})))}},990:(e,t,r)=>{"use strict";r.d(t,{I:()=>i});var n=Object.prototype.hasOwnProperty;function i(e,t,r){if(n.call(e,t))return e[t];var i=r();if(Object.defineProperty&&Object.keys)try{return Object.defineProperty(e,t,{value:i,writable:!0,enumerable:!1}),i}catch(e){}return e[t]=i,i}},389:(e,t,r)=>{"use strict";function n(e,t=500,r={}){const n=r?.leading||!1;let i;return(...r)=>{n&&void 0===i&&(e.apply(this,r),i=setTimeout((()=>{i=clearTimeout(i)}),t)),n||(clearTimeout(i),i=setTimeout((()=>{e.apply(this,r)}),t))}}function i(e){let t=!1;return(...r)=>{t||(t=!0,e.apply(this,r))}}r.d(t,{J:()=>i,s:()=>n})},289:(e,t,r)=>{"use strict";r.d(t,{GG:()=>o,sB:()=>a});var n=r(878);function i(){return"undefined"==typeof document||"complete"===document.readyState}function o(e,t){if(i())return e();(0,n.sp)("load",e,t)}function a(e){if(i())return e();(0,n.DD)("DOMContentLoaded",e)}},384:(e,t,r)=>{"use strict";r.d(t,{NT:()=>o,US:()=>l,Zm:()=>a,bQ:()=>c,dV:()=>s,nY:()=>u,pV:()=>d});var n=r(154),i=r(863);const o={beacon:"bam.nr-data.net",errorBeacon:"bam.nr-data.net"};function a(){return n.gm.NREUM||(n.gm.NREUM={}),void 0===n.gm.newrelic&&(n.gm.newrelic=n.gm.NREUM),n.gm.NREUM}function s(){let e=a();return e.o||(e.o={ST:n.gm.setTimeout,SI:n.gm.setImmediate,CT:n.gm.clearTimeout,XHR:n.gm.XMLHttpRequest,REQ:n.gm.Request,EV:n.gm.Event,PR:n.gm.Promise,MO:n.gm.MutationObserver,FETCH:n.gm.fetch,WS:n.gm.WebSocket}),e}function c(e,t){let r=a();r.initializedAgents??={},t.initializedAt={ms:(0,i.t)(),date:new Date},r.initializedAgents[e]=t}function u(e){let t=a();return t.initializedAgents?.[e]}function l(e,t){a()[e]=t}function d(){return function(){let e=a();const t=e.info||{};e.info={beacon:o.beacon,errorBeacon:o.errorBeacon,...t}}(),function(){let e=a();const t=e.init||{};e.init={...t}}(),s(),function(){let e=a();const t=e.loader_config||{};e.loader_config={...t}}(),a()}},843:(e,t,r)=>{"use strict";r.d(t,{u:()=>i});var n=r(878);function i(e,t=!1,r,i){(0,n.DD)("visibilitychange",(function(){if(t)return void("hidden"===document.visibilityState&&e());e(document.visibilityState)}),r,i)}},434:(e,t,r)=>{"use strict";r.d(t,{Jt:()=>o,YM:()=>c});var n=r(836),i=r(607);const o="nr@original:".concat(i.W);var a=Object.prototype.hasOwnProperty,s=!1;function c(e,t){return e||(e=n.ee),r.inPlace=function(e,t,n,i,o){n||(n="");const a="-"===n.charAt(0);for(let s=0;s<t.length;s++){const c=t[s],u=e[c];l(u)||(e[c]=r(u,a?c+n:n,i,c,o))}},r.flag=o,r;function r(t,r,n,s,c){return l(t)?t:(r||(r=""),nrWrapper[o]=t,function(e,t,r){if(Object.defineProperty&&Object.keys)try{return Object.keys(e).forEach((function(r){Object.defineProperty(t,r,{get:function(){return e[r]},set:function(t){return e[r]=t,t}})})),t}catch(e){u([e],r)}for(var n in e)a.call(e,n)&&(t[n]=e[n])}(t,nrWrapper,e),nrWrapper);function nrWrapper(){var o,a,l,d;try{a=this,o=[...arguments],l="function"==typeof n?n(o,a):n||{}}catch(t){u([t,"",[o,a,s],l],e)}i(r+"start",[o,a,s],l,c);try{return d=t.apply(a,o)}catch(e){throw i(r+"err",[o,a,e],l,c),e}finally{i(r+"end",[o,a,d],l,c)}}}function i(r,n,i,o){if(!s||t){var a=s;s=!0;try{e.emit(r,n,i,t,o)}catch(t){u([t,r,n,i],e)}s=a}}}function u(e,t){t||(t=n.ee);try{t.emit("internal-error",e)}catch(e){}}function l(e){return!(e&&"function"==typeof e&&e.apply&&!e[o])}},993:(e,t,r)=>{"use strict";r.d(t,{A$:()=>o,ET:()=>a,p_:()=>i});var n=r(860);const i={ERROR:"ERROR",WARN:"WARN",INFO:"INFO",DEBUG:"DEBUG",TRACE:"TRACE"},o={OFF:0,ERROR:1,WARN:2,INFO:3,DEBUG:4,TRACE:5},a="log";n.K7.logging},773:(e,t,r)=>{"use strict";r.d(t,{z_:()=>o,XG:()=>s,TZ:()=>n,rs:()=>i,xV:()=>a});r(154),r(566),r(384);const n=r(860).K7.metrics,i="sm",o="cm",a="storeSupportabilityMetrics",s="storeEventMetrics"},630:(e,t,r)=>{"use strict";r.d(t,{T:()=>n});const n=r(860).K7.pageViewEvent},782:(e,t,r)=>{"use strict";r.d(t,{T:()=>n});const n=r(860).K7.pageViewTiming},344:(e,t,r)=>{"use strict";r.d(t,{G4:()=>i});var n=r(614);r(860).K7.sessionReplay;const i={RECORD:"recordReplay",PAUSE:"pauseReplay",REPLAY_RUNNING:"replayRunning",ERROR_DURING_REPLAY:"errorDuringReplay"};n.g.ERROR,n.g.FULL,n.g.OFF},234:(e,t,r)=>{"use strict";r.d(t,{W:()=>o});var n=r(836),i=r(687);class o{constructor(e,t){this.agentIdentifier=e,this.ee=n.ee.get(e),this.featureName=t,this.blocked=!1}deregisterDrain(){(0,i.x3)(this.agentIdentifier,this.featureName)}}},603:(e,t,r)=>{"use strict";r.d(t,{j:()=>K});var n=r(860),i=r(555),o=r(371),a=r(908),s=r(836),c=r(687),u=r(289),l=r(154),d=r(944),f=r(773),g=r(384),p=r(344);const m=["setErrorHandler","finished","addToTrace","addRelease","recordCustomEvent","addPageAction","setCurrentRouteName","setPageViewName","setCustomAttribute","interaction","noticeError","setUserId","setApplicationVersion","start",p.G4.RECORD,p.G4.PAUSE,"log","wrapLogger"],h=["setErrorHandler","finished","addToTrace","addRelease"];var v=r(863),b=r(614),y=r(993);var w=r(646),R=r(434);const A=new Map;function E(e,t,r,n){if("object"!=typeof t||!t||"string"!=typeof r||!r||"function"!=typeof t[r])return(0,d.R)(29);const i=function(e){return(e||s.ee).get("logger")}(e),o=(0,R.YM)(i),a=new w.y(s.P);a.level=n.level,a.customAttributes=n.customAttributes;const c=t[r]?.[R.Jt]||t[r];return A.set(c,a),o.inPlace(t,[r],"wrap-logger-",(()=>A.get(c))),i}function _(){const e=(0,g.pV)();m.forEach((t=>{e[t]=(...r)=>function(t,...r){let n=[];return Object.values(e.initializedAgents).forEach((e=>{e&&e.api?e.exposed&&e.api[t]&&n.push(e.api[t](...r)):(0,d.R)(38,t)})),n.length>1?n:n[0]}(t,...r)}))}const x={};function N(e,t,g=!1){t||(0,c.Ak)(e,"api");const m={};var w=s.ee.get(e),R=w.get("tracer");x[e]=b.g.OFF,w.on(p.G4.REPLAY_RUNNING,(t=>{x[e]=t}));var A="api-",_=A+"ixn-";function N(t,r,n,o){const a=(0,i.Vp)(e);return null===r?delete a.jsAttributes[t]:(0,i.x1)(e,{...a,jsAttributes:{...a.jsAttributes,[t]:r}}),j(A,n,!0,o||null===r?"session":void 0)(t,r)}function k(){}m.log=function(e,{customAttributes:t={},level:r=y.p_.INFO}={}){(0,a.p)(f.xV,["API/log/called"],void 0,n.K7.metrics,w),function(e,t,r={},i=y.p_.INFO){(0,a.p)(f.xV,["API/logging/".concat(i.toLowerCase(),"/called")],void 0,n.K7.metrics,e),(0,a.p)(y.ET,[(0,v.t)(),t,r,i],void 0,n.K7.logging,e)}(w,e,t,r)},m.wrapLogger=(e,t,{customAttributes:r={},level:i=y.p_.INFO}={})=>{(0,a.p)(f.xV,["API/wrapLogger/called"],void 0,n.K7.metrics,w),E(w,e,t,{customAttributes:r,level:i})},h.forEach((e=>{m[e]=j(A,e,!0,"api")})),m.addPageAction=j(A,"addPageAction",!0,n.K7.genericEvents),m.recordCustomEvent=j(A,"recordCustomEvent",!0,n.K7.genericEvents),m.setPageViewName=function(t,r){if("string"==typeof t)return"/"!==t.charAt(0)&&(t="/"+t),(0,o.f)(e).customTransaction=(r||"http://custom.transaction")+t,j(A,"setPageViewName",!0)()},m.setCustomAttribute=function(e,t,r=!1){if("string"==typeof e){if(["string","number","boolean"].includes(typeof t)||null===t)return N(e,t,"setCustomAttribute",r);(0,d.R)(40,typeof t)}else(0,d.R)(39,typeof e)},m.setUserId=function(e){if("string"==typeof e||null===e)return N("enduser.id",e,"setUserId",!0);(0,d.R)(41,typeof e)},m.setApplicationVersion=function(e){if("string"==typeof e||null===e)return N("application.version",e,"setApplicationVersion",!1);(0,d.R)(42,typeof e)},m.start=()=>{try{(0,a.p)(f.xV,["API/start/called"],void 0,n.K7.metrics,w),w.emit("manual-start-all")}catch(e){(0,d.R)(23,e)}},m[p.G4.RECORD]=function(){(0,a.p)(f.xV,["API/recordReplay/called"],void 0,n.K7.metrics,w),(0,a.p)(p.G4.RECORD,[],void 0,n.K7.sessionReplay,w)},m[p.G4.PAUSE]=function(){(0,a.p)(f.xV,["API/pauseReplay/called"],void 0,n.K7.metrics,w),(0,a.p)(p.G4.PAUSE,[],void 0,n.K7.sessionReplay,w)},m.interaction=function(e){return(new k).get("object"==typeof e?e:{})};const T=k.prototype={createTracer:function(e,t){var r={},i=this,o="function"==typeof t;return(0,a.p)(f.xV,["API/createTracer/called"],void 0,n.K7.metrics,w),g||(0,a.p)(_+"tracer",[(0,v.t)(),e,r],i,n.K7.spa,w),function(){if(R.emit((o?"":"no-")+"fn-start",[(0,v.t)(),i,o],r),o)try{return t.apply(this,arguments)}catch(e){const t="string"==typeof e?new Error(e):e;throw R.emit("fn-err",[arguments,this,t],r),t}finally{R.emit("fn-end",[(0,v.t)()],r)}}}};function j(e,t,r,i){return function(){return(0,a.p)(f.xV,["API/"+t+"/called"],void 0,n.K7.metrics,w),i&&(0,a.p)(e+t,[r?(0,v.t)():performance.now(),...arguments],r?null:this,i,w),r?void 0:this}}function I(){r.e(296).then(r.bind(r,778)).then((({setAPI:t})=>{t(e),(0,c.Ze)(e,"api")})).catch((e=>{(0,d.R)(27,e),w.abort()}))}return["actionText","setName","setAttribute","save","ignore","onEnd","getContext","end","get"].forEach((e=>{T[e]=j(_,e,void 0,g?n.K7.softNav:n.K7.spa)})),m.setCurrentRouteName=g?j(_,"routeName",void 0,n.K7.softNav):j(A,"routeName",!0,n.K7.spa),m.noticeError=function(t,r){"string"==typeof t&&(t=new Error(t)),(0,a.p)(f.xV,["API/noticeError/called"],void 0,n.K7.metrics,w),(0,a.p)("err",[t,(0,v.t)(),!1,r,!!x[e]],void 0,n.K7.jserrors,w)},l.RI?(0,u.GG)((()=>I()),!0):I(),m}var k=r(217),T=r(122);const j={accountID:void 0,trustKey:void 0,agentID:void 0,licenseKey:void 0,applicationID:void 0,xpid:void 0},I={};var O=r(284);const S=e=>{const t=e.startsWith("http");e+="/",r.p=t?e:"https://"+e};let P=!1;function K(e,t={},r,n){let{init:a,info:c,loader_config:u,runtime:d={},exposed:f=!0}=t;d.loaderType=r;const p=(0,g.pV)();c||(a=p.init,c=p.info,u=p.loader_config),(0,k.xN)(e.agentIdentifier,a||{}),function(e,t){if(!e)throw new Error("All loader-config objects require an agent identifier!");I[e]=(0,T.a)(t,j);const r=(0,g.nY)(e);r&&(r.loader_config=I[e])}(e.agentIdentifier,u||{}),c.jsAttributes??={},l.bv&&(c.jsAttributes.isWorker=!0),(0,i.x1)(e.agentIdentifier,c);const m=(0,k.D0)(e.agentIdentifier),h=[c.beacon,c.errorBeacon];P||(m.proxy.assets&&(S(m.proxy.assets),h.push(m.proxy.assets)),m.proxy.beacon&&h.push(m.proxy.beacon),_(),(0,g.US)("activatedFeatures",O.B),e.runSoftNavOverSpa&&=!0===m.soft_navigations.enabled&&m.feature_flags.includes("soft_nav")),d.denyList=[...m.ajax.deny_list||[],...m.ajax.block_internal?h:[]],d.ptid=e.agentIdentifier,(0,o.V)(e.agentIdentifier,d),e.ee=s.ee.get(e.agentIdentifier),void 0===e.api&&(e.api=N(e.agentIdentifier,n,e.runSoftNavOverSpa)),void 0===e.exposed&&(e.exposed=f),P=!0}},374:(e,t,r)=>{r.nc=(()=>{try{return document?.currentScript?.nonce}catch(e){}return""})()},860:(e,t,r)=>{"use strict";r.d(t,{$J:()=>u,K7:()=>s,P3:()=>c,XX:()=>i,qY:()=>n,v4:()=>a});const n="events",i="jserrors",o="browser/blobs",a="rum",s={ajax:"ajax",genericEvents:"generic_events",jserrors:i,logging:"logging",metrics:"metrics",pageAction:"page_action",pageViewEvent:"page_view_event",pageViewTiming:"page_view_timing",sessionReplay:"session_replay",sessionTrace:"session_trace",softNav:"soft_navigations",spa:"spa"},c={[s.pageViewEvent]:1,[s.pageViewTiming]:2,[s.metrics]:3,[s.jserrors]:4,[s.spa]:5,[s.ajax]:6,[s.sessionTrace]:7,[s.softNav]:8,[s.sessionReplay]:9,[s.logging]:10,[s.genericEvents]:11},u={[s.pageViewEvent]:a,[s.pageViewTiming]:n,[s.ajax]:n,[s.spa]:n,[s.softNav]:n,[s.metrics]:i,[s.jserrors]:i,[s.sessionTrace]:o,[s.sessionReplay]:o,[s.logging]:"browser/logs",[s.genericEvents]:"ins"}}},n={};function i(e){var t=n[e];if(void 0!==t)return t.exports;var o=n[e]={exports:{}};return r[e](o,o.exports,i),o.exports}i.m=r,i.d=(e,t)=>{for(var r in t)i.o(t,r)&&!i.o(e,r)&&Object.defineProperty(e,r,{enumerable:!0,get:t[r]})},i.f={},i.e=e=>Promise.all(Object.keys(i.f).reduce(((t,r)=>(i.f[r](e,t),t)),[])),i.u=e=>"nr-rum-1.283.2.min.js",i.o=(e,t)=>Object.prototype.hasOwnProperty.call(e,t),e={},t="NRBA-1.283.2.PROD:",i.l=(r,n,o,a)=>{if(e[r])e[r].push(n);else{var s,c;if(void 0!==o)for(var u=document.getElementsByTagName("script"),l=0;l<u.length;l++){var d=u[l];if(d.getAttribute("src")==r||d.getAttribute("data-webpack")==t+o){s=d;break}}if(!s){c=!0;var f={296:"sha512-2Y8GMAOGF658KnXzOZ/v+DlLch8TBFvV0tTNnOy9wrpvtDa1t5CdZMyX+LubTymBlzPp6NUjllBghMCZqXBPmg=="};(s=document.createElement("script")).charset="utf-8",s.timeout=120,i.nc&&s.setAttribute("nonce",i.nc),s.setAttribute("data-webpack",t+o),s.src=r,0!==s.src.indexOf(window.location.origin+"/")&&(s.crossOrigin="anonymous"),f[a]&&(s.integrity=f[a])}e[r]=[n];var g=(t,n)=>{s.onerror=s.onload=null,clearTimeout(p);var i=e[r];if(delete e[r],s.parentNode&&s.parentNode.removeChild(s),i&&i.forEach((e=>e(n))),t)return t(n)},p=setTimeout(g.bind(null,void 0,{type:"timeout",target:s}),12e4);s.onerror=g.bind(null,s.onerror),s.onload=g.bind(null,s.onload),c&&document.head.appendChild(s)}},i.r=e=>{"undefined"!=typeof Symbol&&Symbol.toStringTag&&Object.defineProperty(e,Symbol.toStringTag,{value:"Module"}),Object.defineProperty(e,"__esModule",{value:!0})},i.p="https://js-agent.newrelic.com/",(()=>{var e={374:0,840:0};i.f.j=(t,r)=>{var n=i.o(e,t)?e[t]:void 0;if(0!==n)if(n)r.push(n[2]);else{var o=new Promise(((r,i)=>n=e[t]=[r,i]));r.push(n[2]=o);var a=i.p+i.u(t),s=new Error;i.l(a,(r=>{if(i.o(e,t)&&(0!==(n=e[t])&&(e[t]=void 0),n)){var o=r&&("load"===r.type?"missing":r.type),a=r&&r.target&&r.target.src;s.message="Loading chunk "+t+" failed.\n("+o+": "+a+")",s.name="ChunkLoadError",s.type=o,s.request=a,n[1](s)}}),"chunk-"+t,t)}};var t=(t,r)=>{var n,o,[a,s,c]=r,u=0;if(a.some((t=>0!==e[t]))){for(n in s)i.o(s,n)&&(i.m[n]=s[n]);if(c)c(i)}for(t&&t(r);u<a.length;u++)o=a[u],i.o(e,o)&&e[o]&&e[o][0](),e[o]=0},r=self["webpackChunk:NRBA-1.283.2.PROD"]=self["webpackChunk:NRBA-1.283.2.PROD"]||[];r.forEach(t.bind(null,0)),r.push=t.bind(null,r.push.bind(r))})(),(()=>{"use strict";i(374);var e=i(944),t=i(344),r=i(566);class n{agentIdentifier;constructor(){this.agentIdentifier=(0,r.LA)(16)}#e(t,...r){if("function"==typeof this.api?.[t])return this.api[t](...r);(0,e.R)(35,t)}addPageAction(e,t){return this.#e("addPageAction",e,t)}recordCustomEvent(e,t){return this.#e("recordCustomEvent",e,t)}setPageViewName(e,t){return this.#e("setPageViewName",e,t)}setCustomAttribute(e,t,r){return this.#e("setCustomAttribute",e,t,r)}noticeError(e,t){return this.#e("noticeError",e,t)}setUserId(e){return this.#e("setUserId",e)}setApplicationVersion(e){return this.#e("setApplicationVersion",e)}setErrorHandler(e){return this.#e("setErrorHandler",e)}addRelease(e,t){return this.#e("addRelease",e,t)}log(e,t){return this.#e("log",e,t)}}class o extends n{#e(t,...r){if("function"==typeof this.api?.[t])return this.api[t](...r);(0,e.R)(35,t)}start(){return this.#e("start")}finished(e){return this.#e("finished",e)}recordReplay(){return this.#e(t.G4.RECORD)}pauseReplay(){return this.#e(t.G4.PAUSE)}addToTrace(e){return this.#e("addToTrace",e)}setCurrentRouteName(e){return this.#e("setCurrentRouteName",e)}interaction(){return this.#e("interaction")}wrapLogger(e,t,r){return this.#e("wrapLogger",e,t,r)}}var a=i(860),s=i(217);const c=Object.values(a.K7);function u(e){const t={};return c.forEach((r=>{t[r]=function(e,t){return!0===(0,s.gD)(t,"".concat(e,".enabled"))}(r,e)})),t}var l=i(603);var d=i(687),f=i(234),g=i(289),p=i(154),m=i(384);const h=e=>p.RI&&!0===(0,s.gD)(e,"privacy.cookies_enabled");function v(e){return!!(0,m.dV)().o.MO&&h(e)&&!0===(0,s.gD)(e,"session_trace.enabled")}var b=i(389);class y extends f.W{constructor(e,t,r=!0){super(e.agentIdentifier,t),this.auto=r,this.abortHandler=void 0,this.featAggregate=void 0,this.onAggregateImported=void 0,!1===e.init[this.featureName].autoStart&&(this.auto=!1),this.auto?(0,d.Ak)(e.agentIdentifier,t):this.ee.on("manual-start-all",(0,b.J)((()=>{(0,d.Ak)(e.agentIdentifier,this.featureName),this.auto=!0,this.importAggregator(e)})))}importAggregator(t,r={}){if(this.featAggregate||!this.auto)return;let n;this.onAggregateImported=new Promise((e=>{n=e}));const o=async()=>{let o;try{if(h(this.agentIdentifier)){const{setupAgentSession:e}=await i.e(296).then(i.bind(i,861));o=e(t)}}catch(t){(0,e.R)(20,t),this.ee.emit("internal-error",[t]),this.featureName===a.K7.sessionReplay&&this.abortHandler?.()}try{if(!this.#t(this.featureName,o))return(0,d.Ze)(this.agentIdentifier,this.featureName),void n(!1);const{lazyFeatureLoader:e}=await i.e(296).then(i.bind(i,103)),{Aggregate:a}=await e(this.featureName,"aggregate");this.featAggregate=new a(t,r),t.runtime.harvester.initializedAggregates.push(this.featAggregate),n(!0)}catch(t){(0,e.R)(34,t),this.abortHandler?.(),(0,d.Ze)(this.agentIdentifier,this.featureName,!0),n(!1),this.ee&&this.ee.abort()}};p.RI?(0,g.GG)((()=>o()),!0):o()}#t(e,t){switch(e){case a.K7.sessionReplay:return v(this.agentIdentifier)&&!!t;case a.K7.sessionTrace:return!!t;default:return!0}}}var w=i(630);class R extends y{static featureName=w.T;constructor(e,t=!0){super(e,w.T,t),this.importAggregator(e)}}var A=i(908),E=i(843),_=i(878),x=i(782),N=i(863);class k extends y{static featureName=x.T;constructor(e,t=!0){super(e,x.T,t),p.RI&&((0,E.u)((()=>(0,A.p)("docHidden",[(0,N.t)()],void 0,x.T,this.ee)),!0),(0,_.sp)("pagehide",(()=>(0,A.p)("winPagehide",[(0,N.t)()],void 0,x.T,this.ee))),this.importAggregator(e))}}var T=i(773);class j extends y{static featureName=T.TZ;constructor(e,t=!0){super(e,T.TZ,t),this.importAggregator(e)}}new class extends o{constructor(t){super(),p.gm?(this.features={},(0,m.bQ)(this.agentIdentifier,this),this.desiredFeatures=new Set(t.features||[]),this.desiredFeatures.add(R),this.runSoftNavOverSpa=[...this.desiredFeatures].some((e=>e.featureName===a.K7.softNav)),(0,l.j)(this,t,t.loaderType||"agent"),this.run()):(0,e.R)(21)}get config(){return{info:this.info,init:this.init,loader_config:this.loader_config,runtime:this.runtime}}run(){try{const t=u(this.agentIdentifier),r=[...this.desiredFeatures];r.sort(((e,t)=>a.P3[e.featureName]-a.P3[t.featureName])),r.forEach((r=>{if(!t[r.featureName]&&r.featureName!==a.K7.pageViewEvent)return;if(this.runSoftNavOverSpa&&r.featureName===a.K7.spa)return;if(!this.runSoftNavOverSpa&&r.featureName===a.K7.softNav)return;const n=function(e){switch(e){case a.K7.ajax:return[a.K7.jserrors];case a.K7.sessionTrace:return[a.K7.ajax,a.K7.pageViewEvent];case a.K7.sessionReplay:return[a.K7.sessionTrace];case a.K7.pageViewTiming:return[a.K7.pageViewEvent];default:return[]}}(r.featureName).filter((e=>!(e in this.features)));n.length>0&&(0,e.R)(36,{targetFeature:r.featureName,missingDependencies:n}),this.features[r.featureName]=new r(this)}))}catch(t){(0,e.R)(22,t);for(const e in this.features)this.features[e].abortHandler?.();const r=(0,m.Zm)();delete r.initializedAgents[this.agentIdentifier]?.api,delete r.initializedAgents[this.agentIdentifier]?.features,delete this.sharedAggregator;return r.ee.get(this.agentIdentifier).abort(),!1}}}({features:[R,k,j],loaderType:"lite"})})()})();</script>
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<h1 class="nist-page__title">NanoFab Equipment</h1>
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<p><a class="ck-anchor" id="tools_top"></a>Over 100 commercial tools are available within the NanoFab's 5600 m<sup>2</sup> (60,000 ft<sup>2</sup>) of advanced laboratory space, which includes 1800 m<sup>2</sup> (19,000 ft<sup>2</sup>) of cleanroom. Most tools are located in the 750 m<sup>2</sup> (8,000 ft<sup>2</sup>) class 100 cleanroom. Our key capabilities, tools, and processes are summarized below.</p><hr><h2><a class="ck-anchor" id="tools_litho"></a>Lithography</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-cee-apogee-spinner">Spin Coater: CEE Apogee Spinner</a></li><li><a class="CP___PAGEID_2993340" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-0">Direct Write Electron Beam Lithography System: JEOL JBX 6300-FS</a></li><li><a class="CP___PAGEID_3103620" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-lithography">Direct Write Electron Beam Lithography System: JEOL JBX 6300-FS (Cleanroom)</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-heidelberg-mla150-maskless-aligner">Maskless Aligner: Heidelberg MLA 150</a></li><li><a class="CP___PAGEID_2993608" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-asml-pas5500275d-stepper">Stepper: ASML PAS5500/275D</a></li><li><a class="CP___PAGEID_2993638" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-heidelberg-instruments-dwl-2000-laser-pattern-generator">Laser Pattern Generator: Heidelberg Instruments DWL 2000</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-abm-mask-contact-aligner" data-entity-type="node" data-entity-uuid="3bab96dc-967d-457f-aed2-feb9b3eaf3ee" data-entity-substitution="canonical" title="NanoFab Tool: ABM Mask Contact Aligner">Contact Aligner: ABM Mask Contact Aligner</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-suss-microtec-maba6-gen4-mask-aligner" data-entity-type="node" data-entity-uuid="ea6c67d6-a36d-46f9-ad58-a7b331e76e2d" data-entity-substitution="canonical" title="NanoFab Tool: Suss MicroTec MA/BA6 Gen4 Mask Aligner">Contact Aligner: Suss MicroTec MA6/BA6 Gen 4</a></li><li><a class="CP___PAGEID_2993724" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-suss-microtec-acs200-automated-resist-coater">Automated Resist Coater: Suss MicroTec ACS200</a></li><li><a class="CP___PAGEID_2993726" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-suss-microtec-delta12aq-automated-resist-developer">Automated Resist Developer: Suss MicroTec Delta12AQ</a></li><li><a class="CP___PAGEID_2993720" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-nanonex-nx-2000-nanoimprint-lithography-nil-system">Nano-Imprint Lithography (NIL) System: Nanonex NX-2000</a></li><li><a class="CP___PAGEID_2993733" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bachur-associates-ls-200fsx-photoresist-stabilization">Photoresist Stabilization System: Bachur &amp; Associates LS-200FSX</a></li></ul><h2><a class="ck-anchor" id="tools_slitho"></a>Soft Lithography</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-silanization-oven">Silanization Oven: Yield Engineering System YES-1224P</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-microfluidic-test-station">Microfluidic Test Station: CorSolutions FLD20-T</a></li><li><a class="CP___PAGEID_3187146" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-pdms-casting-station">PDMS Casting Station</a></li><li><a class="CP___PAGEID_3187170" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-envirco-laminar-hood">Assembly Hood: Envirco Laminar Hood</a></li><li><a class="CP___PAGEID_3187177" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-harrick-plasma-pdc-32-plasma-bonder">Plasma Bonder: Harrick Plasma PDC-32</a></li><li><a class="CP___PAGEID_3187163" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-jeio-tech-12g-forced-convection-oven">Forced Convection Curing Oven: Jeio Tech OF-12G</a></li></ul><h2><a class="ck-anchor" id="tools_fib"></a>Focused Ion Beam Nanofabrication and Characterization</h2><ul><li><a href="/laboratories/tools-instruments/nanofab-tool-thermofisher-hydra-pfib-dual-beam-scanning-electron" data-entity-type="node" data-entity-uuid="daad0716-2549-4878-b651-1b33e3ef8a2f" data-entity-substitution="canonical" title="NanoFab Tool: ThermoFisher Hydra PFIB Dual Beam Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB)">ThermoFisher Hydra PFIB Dual Beam Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB)</a></li></ul><h2><a class="ck-anchor" id="tools_imaging"></a>Advanced Imaging and Analysis</h2><ul><li><a class="CP___PAGEID_2994895" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-fei-titan-80-300-analytical-transmission-electron">Analytical Transmission Electron Microscope: FEI Titan 80-300</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-zeiss-gemini-500-field-emission-scanning-electron" data-entity-type="node" data-entity-uuid="34f418d2-5d5c-44f9-9f56-882fb0b0f6af" data-entity-substitution="canonical" title="NanoFab Tool: Zeiss Gemini 500 Field Emission Scanning Electron Microscope">Field Emission Scanning Electron Microscope: Zeiss Gemini 500</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-zeiss-gemini-560-field-emission-scanning-electron" data-entity-type="node" data-entity-uuid="972c9a86-c8bb-4feb-8523-e3b11e47eeaf" data-entity-substitution="canonical" title="NanoFab Tool: Zeiss Gemini 560 Field Emission Scanning Electron Microscope">Field Emission Scanning Electron Microscope: Zeiss Gemini 560</a></li><li><a class="CP___PAGEID_2994900" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bruker-dimension-fastscan-atomic-force-microscope">Atomic Force Microscope: Bruker Dimension FastScan</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-asylum-jupiter-xr-atomic-force-microscope" data-entity-type="node" data-entity-uuid="8a8699f1-a722-496c-a787-925b5b0c66ca" data-entity-substitution="canonical" title="NanoFab Tool: Asylum Jupiter XR Atomic Force Microscope">Atomic Force Microscope: Asylum Jupiter XR</a></li><li><a class="CP___PAGEID_2994913" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-rigaku-smartlab-x-ray-diffraction">X-Ray Diffraction: Rigaku SmartLab</a></li></ul><h2><a class="ck-anchor" id="tools_sample"></a>Imaging and Analysis Sample and Substrate Preparation</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ted-pella-easiglow-glow-discharge-cleaning-system">Glow Discharge Cleaning: Pelco easiGlow Glow Discharge System</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-leica-em-gp-automatic-plunge-freezer">Automatic Plunge Freezer: Leica EM GP</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-fischione-model-1040-nanomill-ion-mill">NanoMill Ion Mill: Fischone Model 1040</a></li><li><a class="CP___PAGEID_2998779" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-lattice-gear-latticeax-cleaving-tool">Cleaving Tool: Lattice Gear LatticAx</a></li></ul><h2><a class="ck-anchor" id="tools_metro"></a>Metrology</h2><ul><li><a class="CP___PAGEID_2995314" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-nikon-l200-compound-optical-microscope">Compound Optical Microscope: Nikon L200</a></li><li><a class="CP___PAGEID_2995321" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-nikon-smz1500-stereo-microscope">Stereo Microscope: Nikon SMZ1500</a></li><li><a class="CP___PAGEID_2995327" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-olympus-szh10-stereo-microscope">Stereo Microscope: Olympus SZH10</a></li><li><a class="CP___PAGEID_2995332" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-first-ten-angstroms-fta125-contact-angle-goniometer">Contact Angle Goniometer: First Ten Angstroms FTA125</a></li><li><a class="CP___PAGEID_2995296" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bruker-dektak-xt-profilometer">Contact Profilometer: Bruker Dektak XT</a></li><li><a class="CP___PAGEID_2995357" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bruker-dektak-xt-contact-profilometer">Contact Profilometer: Bruker Dektak 6M</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sensofar-optical-profilometer">Optical Profilometer: Sensofar</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ecopia-hall-effect-measurement-system">Hall Effect Measurement: Ecopia HMS-5500</a></li><li><a class="CP___PAGEID_3103630" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-filmetrics-f40-uv-reflectometer">Reflectometer: Filmetrics F40-UV&nbsp;Thin Film Measurement</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-filmetrics-f50-uv-mapping-reflectometer">Reflectometer: Filmetrics F50-UV Thin Film Mapping system</a></li><li><a class="CP___PAGEID_3185226" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-four-dimensions-280di-sheet-resistance-mapping-system">Four Point Probe: Four Dimension 280DI</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-mercury-probe">Mercury Probe: Four Dimensions CV92A</a></li><li><a class="CP___PAGEID_2995306" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-keithley-4200-scs-parametric-test-station">Parametric Test Station: Keithley 4200 SCS</a></li><li><a class="CP___PAGEID_2995343" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-j-woollam-m-2000-di-spectroscopic-ellipsometer">Spectroscopic Ellipsometer: J.A. Woollam M-2000 DI</a></li><li><a class="CP___PAGEID_2995189" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-toho-technology-flx-2320-stress-measurement-tool">Stress Measurement Tool: Toho Technology FLX-2320</a></li></ul><h2><a class="ck-anchor" id="tools_thinfilm"></a>Thin Film Deposition and Processing</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-annealsys-rta">Rapid Thermal Annealer: AnnealSys AS-Master</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-denton-vacuum-infinity-22-electron-beam-evaporator" data-entity-type="node" data-entity-uuid="397c7794-671e-4d19-93a6-0e3dbd5e5fb5" data-entity-substitution="canonical" title="NanoFab Tool: Denton Vacuum Infinity 22 Electron Beam Evaporator">Evaporator: Denton Vacuum Infinity 22</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-denton-vacuum-infinity-22-electron-beam-and-thermal" data-entity-type="node" data-entity-uuid="8e839448-a89d-4f4f-b194-20550dba456e" data-entity-substitution="canonical" title="NanoFab Tool: Denton Vacuum Infinity 22 Electron Beam and Thermal Evaporator">Electron Beam and Thermal Evaporator: Denton Vacuum Infinity 22</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-thermal-thin-al-evaporator">Thermal Thin-Al Evaporator: Denton Bench Top Turbo</a></li><li><a class="CP___PAGEID_3113111" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-4wave-ibdbtd-cluster-sputter-deposition-system">Cluster Sputter Deposition System: 4Wave IBD/BTD</a></li><li><a class="CP___PAGEID_2996803" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-denton-vacuum-discovery-550-sputtering-system-0">Sputtering System B104 Left: Denton Vacuum Discovery 550</a></li><li><a class="CP___PAGEID_2996812" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-denton-vacuum-discovery-550-sputtering-system-2">Sputtering System B104 Right: Denton Vacuum Discovery 550</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-gemstar-atomic-layer-deposition" data-entity-type="node" data-entity-uuid="b150713f-8037-4739-a6f0-0fba7cc73bf1" data-entity-substitution="canonical" title="NanoFab Tool: Gemstar Atomic Layer Deposition">Atomic Layer Deposition:&nbsp;Arradiance Gemstar</a></li><li><a class="CP___PAGEID_2996858" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-oxford-flexal-atomic-layer-deposition">Atomic Layer Deposition: Oxford FlexAL</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-plasma-therm-versaline-high-density-plasma-enhanced" data-entity-type="node" data-entity-uuid="13f31412-4443-49eb-a3ea-4279c9e011a0" data-entity-substitution="canonical" title="NanoFab Tool: Plasma-Therm Versaline High Density Plasma Enhanced Chemical Vapor Deposition (HD-PECVD)">High Density Plasma Enhanced Chemical Vapor Deposition: Plasma-Therm Versaline</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-oxford-plasmalab-100-plasma-enhanced-chemical-vapor" data-entity-type="node" data-entity-uuid="b11e7517-cab0-499e-8889-9625d577df44" data-entity-substitution="canonical" title="NanoFab Tool: Oxford Plasmalab 100 Plasma Enhanced Chemical Vapor Deposition">Plasma Enhanced Chemical Vapor Deposition: Oxford Plasmalab 100</a></li><li><a class="CP___PAGEID_2997346" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-specialty-coating-systems-pds-2010-parylene-deposition">Parylene Deposition System: Specialty Coating Systems PDS 2010</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-suss-microtec-sb6-gen-2-wafer-bonder" data-entity-type="node" data-entity-uuid="0aeff81f-14f7-4070-92fd-39c85ae1cbab" data-entity-substitution="canonical" title="NanoFab Tool: Suss MicroTec SB6 Gen 2 Wafer Bonder">Wafer Bonder: Suss MicroTec SB6 Gen 2</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sandvik-lpcvd-silicon-nitride">LPCVD Silicon Nitride: Sandvik</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sandvik-lpcvd-amorphous-and-polycrystalline-silicon">LPCVD Polysilicon: Sandvik</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sandvik-oxidation-furnaces">Thermal Oxidation Furnaces: Sandvik</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sandvik-anneal-furnaces">Anneal Furnaces: Sandvik</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sandvik-lpcvd-teos-lto">LPCVD LTO: Sandvik</a></li></ul><h2><a class="ck-anchor" id="tools_dryetch"></a>Dry Etch</h2><ul><li><a href="/laboratories/tools-instruments/nanofab-tool-plasma-therm-corial-deep-silicon-etcher" data-entity-type="node" data-entity-uuid="ee6a9e31-0437-4987-b7e5-bf6d532a2c58" data-entity-substitution="canonical" title="NanoFab Tool: Plasma Therm Corial Deep Silicon Etcher">Deep Silicon Etcher: Plasma Therm Corial</a></li><li><a class="CP___PAGEID_2999054" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-spts-omega-c2l-rapier-deep-silicon-etcher">Deep Silicon Etcher: SPTS Omega c2L Rapier</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-allwin21-downstream-asher" data-entity-type="node" data-entity-uuid="1c31f81a-f240-4674-a012-0e979affff66" data-entity-substitution="canonical" title="NanoFab Tool: AllWin21 Downstream Asher">Downstream Plasma Asher: AllWin21 AW-1008</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-microwave-asher">Microwave Asher: PVA Tepla 300</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-oxford-plasmapro-100-inductively-coupled-plasma-icp-0" data-entity-type="node" data-entity-uuid="70c86963-e477-4b79-9afe-3a1a8789d552" data-entity-substitution="canonical" title="NanoFab Tool: Oxford PlasmaPro 100 Inductively Coupled Plasma (ICP) Dielectric Etcher">Inductively Coupled Plasma (ICP) Dielectric Etcher: Oxford PlasmaPro 100</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-plasma-therm-corial-icp-hbr-cl-etcher" data-entity-type="node" data-entity-uuid="91c391c7-3b0f-4eeb-be61-81ce5e897d8e" data-entity-substitution="canonical" title="NanoFab Tool: Plasma Therm Corial ICP HBr Cl Etcher">Inductively Coupled Plasma (ICP) HBr-Cl Silicon Etcher: Plasma Therm Corial</a></li><li><a class="CP___PAGEID_2999060" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-oxford-plasmalab-100-inductively-coupled-plasma-icp-0">Inductively Coupled Plasma (ICP) Metal Etcher: Oxford Plasmalab 100</a></li><li><a class="CP___PAGEID_2999062" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-oxford-plasmalab-100-inductively-coupled-plasma-icp">Inductively Coupled Plasma (ICP) Silicon Etcher: Oxford Plasmalab 100</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-oxford-plasmapro-100-inductively-coupled-plasma-icp">Inductively Coupled Plasma (ICP) III-V Etcher: Oxford PlasmaPro 100</a></li><li><a class="CP___PAGEID_2999064" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-4wave-ibe-20b-ion-milling-system">Ion Milling System: 4Wave IBE-20B</a></li><li><a class="CP___PAGEID_2999066" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-unaxis-790-reactive-ion-etcher-1">Reactive Ion Etcher: Unaxis 790 Middle</a></li><li><a class="CP___PAGEID_2999068" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-unaxis-790-reactive-ion-etcher-2">Reactive Ion Etcher: Unaxis 790 Right</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-reactive-ion-etcher-790-nitride-left" data-entity-type="node" data-entity-uuid="8229653a-ae98-4dfb-9943-3504d4ff73f3" data-entity-substitution="canonical" title="NanoFab Tool: Reactive Ion Etcher 790 Nitride Left">Reactive Ion Etcher: Unaxis 790 Nitride Left</a></li><li><a class="CP___PAGEID_2999070" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-spts-microetch-hydrofluoric-acid-vapor-etcher">Hydrofluoric Acid Vapor Etcher: SPTS microEtch</a></li><li><a class="CP___PAGEID_2999072" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool%C2%A0xactix-xetch-xenon-difluoride-silicon-etcher">Xenon Difluoride Silicon Etcher: Xactix Xetch</a></li></ul><h2><a class="ck-anchor" id="tools_backend"></a>Back-End-of-Line Tools</h2><ul><li><a class="CP___PAGEID_2998785" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-disco-dad-341-dicing-saw">Dicing Saw: ADT 7132</a></li><li><a class="CP___PAGEID_2998783" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-tresky-t-3000-fc3-hf-flip-chip-bonder">Flip Chip Bonder: Tresky T-3000-FC3-HF</a></li><li><a class="CP___PAGEID_2998787" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-kulicke-and-soffa-model-4526-wedge-wire-bonder">Wedge Wire Bonder: Kulicke and Soffa Model 4526</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ipec-472-chemical-mechanical-polisher-cmp">Chemical Mechanical Polisher (CMP): IPEC 472</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-gnp-412s-post-cmp-wafer-cleaner">Post-CMP Wafer Cleaner: GnP 412S</a></li></ul><h2><a class="ck-anchor" id="tools_wetchem"></a>Wet Chemistry</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ssec-single-wafer-cleaning-system-1">Single Wafer Cleaning System 1: SSEC Model 3300ML</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ssec-single-wafer-cleaning-system-2">Single Wafer Cleaning System 2: SSEC Model 3300ML</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ssec-single-wafer-cleaning-system-3">Single Wafer Cleaning System 3: SSEC Model 3300ML</a></li><li><a class="CP___PAGEID_2998791" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-tousimis-automegasamdri-916b-series-c">Critical Point Dryer: Tousimis Automegasamdri-916B Series C</a></li><li><a class="CP___PAGEID_2998825" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool%C2%A0tousimis-autosamdri-815-series-b">Critical Point Dryer: Tousimis Automegasamdri-815 Series B</a></li><li><a class="CP___PAGEID_2998815" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-microprocess-technology-avenger-spray-solvent-lift-tool">Spray Solvent Lift-off Tool: Microprocess Technology Avenger</a></li><li><a class="CP___PAGEID_2998806" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-reynolds-rca-wet-bench">RCA Wet Bench: Reynolds</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-rca-wet-bench-b102">RCA Wet Bench B102: Reynolds</a></li><li><a class="CP___PAGEID_2998795" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-reynolds-tech-silicon-nitride-etch-wet-bench">Silicon Nitride Etch Wet Bench: Reynolds</a></li><li><a class="CP___PAGEID_2998793" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-reynolds-tech-silicon-etch-wet-bench">Silicon Etch Wet Bench: Reynolds</a></li><li><a class="CP___PAGEID_2998823" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-semitool-psc-101-spin-rinse-dryer">Spin Rinse Dryer: Semitool PSC-101</a></li></ul>
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Created September 13, 2013, Updated February 10, 2025
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