889 lines
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889 lines
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<meta name="description" content="Over 100 commercial tools are available within the NanoFab's 5600 m2 (60,000 ft2" />
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<meta property="og:description" content="Over 100 commercial tools are available within the NanoFab's 5600 m2 (60,000 ft2" />
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<meta property="article:published_time" content="2013-09-13T12:18-04:00" />
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<meta property="article:modified_time" content="2025-02-10T15:49-05:00" />
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<title>NanoFab Equipment | NIST</title>
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<a href="/topics" class="usa-nav__link">All Topics</a>
|
|||
|
|
</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/advanced-communications" class="usa-nav__link">Advanced communications</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/artificial-intelligence" class="usa-nav__link">Artificial intelligence</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/bioscience" class="usa-nav__link">Bioscience</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/buildings-construction" class="usa-nav__link">Buildings and construction</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/chemistry" class="usa-nav__link">Chemistry</a>
|
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|
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</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/cybersecurity" class="usa-nav__link">Cybersecurity</a>
|
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|
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</li>
|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/electronics" class="usa-nav__link">Electronics</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/energy" class="usa-nav__link">Energy</a>
|
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|
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</li>
|
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|
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</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/environment" class="usa-nav__link">Environment</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/fire" class="usa-nav__link">Fire</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/forensic-science" class="usa-nav__link">Forensic science</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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<a href="/health" class="usa-nav__link">Health</a>
|
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|
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</li>
|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/information-technology" class="usa-nav__link">Information technology</a>
|
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|
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</li>
|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/infrastructure" class="usa-nav__link">Infrastructure</a>
|
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|
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</li>
|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/manufacturing" class="usa-nav__link">Manufacturing</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/materials" class="usa-nav__link">Materials</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/mathematics-statistics" class="usa-nav__link">Mathematics and statistics</a>
|
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|
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</li>
|
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|
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</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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<li class="usa-nav__submenu-item">
|
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<a href="/metrology" class="usa-nav__link">Metrology</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/nanotechnology" class="usa-nav__link">Nanotechnology</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/neutron-research" class="usa-nav__link">Neutron research</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/performance-excellence" class="usa-nav__link">Performance excellence</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/physics" class="usa-nav__link">Physics</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/public-safety" class="usa-nav__link">Public safety</a>
|
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|
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</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/quantum-information-science" class="usa-nav__link">Quantum information science</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/resilience" class="usa-nav__link">Resilience</a>
|
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|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/standards" class="usa-nav__link">Standards</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/transportation" class="usa-nav__link">Transportation</a>
|
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|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-3"><span>Labs & Major Programs</span></button>
|
|||
|
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<div id="primary_menu-3" class="usa-nav__submenu usa-megamenu">
|
|||
|
|
<div class="grid-row">
|
|||
|
|
<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/adlp" class="usa-nav__link">Assoc Director of Laboratory Programs</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/laboratories" class="usa-nav__link">Laboratories</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/ctl" class="usa-nav__link">Communications Technology Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/el" class="usa-nav__link">Engineering Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/itl" class="usa-nav__link">Information Technology Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/mml" class="usa-nav__link">Material Measurement Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml" class="usa-nav__link">Physical Measurement Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/user-facilities" class="usa-nav__link">User Facilities</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/ncnr" class="usa-nav__link">NIST Center for Neutron Research</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/cnst" class="usa-nav__link">CNST NanoFab</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/labs-major-programs/research-test-beds" class="usa-nav__link">Research Test Beds</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/laboratories/projects-programs" class="usa-nav__link">Research Projects</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/laboratories/tools-instruments" class="usa-nav__link">Tools & Instruments</a>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/major-programs" class="usa-nav__link">Major Programs</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/baldrige" class="usa-nav__link">Baldrige Performance Excellence Program</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/chips" class="usa-nav__link">CHIPS for America Initiative</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/mep" class="usa-nav__link">Manufacturing Extension Partnership (MEP)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/oam" class="usa-nav__link">Office of Advanced Manufacturing</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/spo" class="usa-nav__link">Special Programs Office</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/tpo" class="usa-nav__link">Technology Partnerships Office</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-4"><span>Services & Resources</span></button>
|
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|
|
<div id="primary_menu-4" class="usa-nav__submenu usa-megamenu">
|
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|
|
<div class="grid-row">
|
|||
|
|
<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/content/standards-measurements" class="usa-nav__link">Standards and Measurements</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/calibrations" class="usa-nav__link">Calibration Services</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/nvlap" class="usa-nav__link">Laboratory Accreditation (NVLAP)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/nist-quality-system" class="usa-nav__link">Quality System</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/srm" class="usa-nav__link">Standard Reference Materials (SRMs)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/sri" class="usa-nav__link">Standard Reference Instruments (SRIs)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/standardsgov" class="usa-nav__link">Standards.gov</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml/time-and-frequency-division/time-services" class="usa-nav__link">Time Services</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml/owm" class="usa-nav__link">Office of Weights and Measures</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
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|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/services-resources/software" class="usa-nav__link">Software</a>
|
|||
|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/data" class="usa-nav__link">Data</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="https://webbook.nist.gov/chemistry/" class="usa-nav__link">Chemistry WebBook</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="https://nvd.nist.gov/" class="usa-nav__link">National Vulnerability Database</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml/productsservices/physical-reference-data" class="usa-nav__link">Physical Reference Data</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/srd" class="usa-nav__link">Standard Reference Data (SRD)</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="https://shop.nist.gov/" class="usa-nav__link">Storefront</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/tpo" class="usa-nav__link">License & Patents</a>
|
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|
|
</li>
|
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|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="https://csrc.nist.gov/" class="usa-nav__link">Computer Security Resource Center (CSRC)</a>
|
|||
|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/nist-research-library" class="usa-nav__link">NIST Research Library</a>
|
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|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
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|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-5"><span>News & Events</span></button>
|
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|
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<div id="primary_menu-5" class="usa-nav__submenu usa-megamenu">
|
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|
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<div class="grid-row">
|
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|
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<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/news-events/news" class="usa-nav__link">News</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/news-events/events" class="usa-nav__link">Events</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/blogs" class="usa-nav__link">Blogs</a>
|
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|
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</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/feature-stories" class="usa-nav__link">Feature Stories</a>
|
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|
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</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/awards" class="usa-nav__link">Awards</a>
|
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</li>
|
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</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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<li class="usa-nav__submenu-item">
|
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|
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<a href="/video-gallery" class="usa-nav__link">Video Gallery</a>
|
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|
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</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
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<a href="/image-gallery" class="usa-nav__link">Image Gallery</a>
|
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|
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</li>
|
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|
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<li class="usa-nav__submenu-item">
|
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|
|
<a href="/pao/media-contacts" class="usa-nav__link">Media Contacts</a>
|
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|
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</li>
|
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|
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</ul>
|
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|
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</div>
|
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|
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</div>
|
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|
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</div>
|
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|
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</li>
|
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<li class="usa-nav__primary-item">
|
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|
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<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-6"><span>About NIST</span></button>
|
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<div id="primary_menu-6" class="usa-nav__submenu usa-megamenu">
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<div class="grid-row">
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<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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<li class="usa-nav__submenu-item">
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<a href="/about-nist" class="usa-nav__link">About Us</a>
|
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<ul class="usa-nav__submenu-list">
|
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<li>
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<a href="/director/leadership" class="usa-nav__link">Leadership</a>
|
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</li>
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<li>
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<a href="/director/nist-organization-structure" class="usa-nav__link">Organization Structure</a>
|
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<li>
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<a href="/about-nist/budget-planning" class="usa-nav__link">Budget & Planning</a>
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</ul>
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<li class="usa-nav__submenu-item">
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<a href="/about-nist/contact-us" class="usa-nav__link">Contact Us</a>
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<li class="usa-nav__submenu-item">
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<p><a class="ck-anchor" id="tools_top"></a>Over 100 commercial tools are available within the NanoFab's 5600 m<sup>2</sup> (60,000 ft<sup>2</sup>) of advanced laboratory space, which includes 1800 m<sup>2</sup> (19,000 ft<sup>2</sup>) of cleanroom. Most tools are located in the 750 m<sup>2</sup> (8,000 ft<sup>2</sup>) class 100 cleanroom. Our key capabilities, tools, and processes are summarized below.</p><hr><h2><a class="ck-anchor" id="tools_litho"></a>Lithography</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-cee-apogee-spinner">Spin Coater: CEE Apogee Spinner</a></li><li><a class="CP___PAGEID_2993340" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-0">Direct Write Electron Beam Lithography System: JEOL JBX 6300-FS</a></li><li><a class="CP___PAGEID_3103620" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-lithography">Direct Write Electron Beam Lithography System: JEOL JBX 6300-FS (Cleanroom)</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-heidelberg-mla150-maskless-aligner">Maskless Aligner: Heidelberg MLA 150</a></li><li><a class="CP___PAGEID_2993608" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-asml-pas5500275d-stepper">Stepper: ASML PAS5500/275D</a></li><li><a class="CP___PAGEID_2993638" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-heidelberg-instruments-dwl-2000-laser-pattern-generator">Laser Pattern Generator: Heidelberg Instruments DWL 2000</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-abm-mask-contact-aligner" data-entity-type="node" data-entity-uuid="3bab96dc-967d-457f-aed2-feb9b3eaf3ee" data-entity-substitution="canonical" title="NanoFab Tool: ABM Mask Contact Aligner">Contact Aligner: ABM Mask Contact Aligner</a></li><li><a href="/laboratories/tools-instruments/nanofab-tool-suss-microtec-maba6-gen4-mask-aligner" data-entity-type="node" data-entity-uuid="ea6c67d6-a36d-46f9-ad58-a7b331e76e2d" data-entity-substitution="canonical" title="NanoFab Tool: Suss MicroTec MA/BA6 Gen4 Mask Aligner">Contact Aligner: Suss MicroTec MA6/BA6 Gen 4</a></li><li><a class="CP___PAGEID_2993724" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-suss-microtec-acs200-automated-resist-coater">Automated Resist Coater: Suss MicroTec ACS200</a></li><li><a class="CP___PAGEID_2993726" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-suss-microtec-delta12aq-automated-resist-developer">Automated Resist Developer: Suss MicroTec Delta12AQ</a></li><li><a class="CP___PAGEID_2993720" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-nanonex-nx-2000-nanoimprint-lithography-nil-system">Nano-Imprint Lithography (NIL) System: Nanonex NX-2000</a></li><li><a class="CP___PAGEID_2993733" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bachur-associates-ls-200fsx-photoresist-stabilization">Photoresist Stabilization System: Bachur & Associates LS-200FSX</a></li></ul><h2><a class="ck-anchor" id="tools_slitho"></a>Soft Lithography</h2><ul><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-silanization-oven">Silanization Oven: Yield Engineering System YES-1224P</a></li><li><a href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-microfluidic-test-station">Microfluidic Test Station: CorSolutions FLD20-T</a></li><li><a class="CP___PAGEID_3187146" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-pdms-casting-station">PDMS Casting Station</a></li><li><a class="CP___PAGEID_3187170" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-envirco-laminar-hood">Assembly Hood: Envirco Laminar Hood</a></li><li><a class="CP___PAGEID_3187177" href="https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-harrick-plasma-pdc-32-plasma-bonder">Plasma Bonder: Harrick Plasma PDC-32</a></li><li><a class="CP___PAGEI
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Created September 13, 2013, Updated February 10, 2025
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