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nist-gov/www.nist.gov/topic-terms/lithography
Scott Williams 4063bef310 Initital commit.
2025-03-05 18:59:57 +00:00

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about="/news-events/news/2023/04/nists-nanofab-reopens-its-doors-universities-industry-and-research" typeof="schema:Article" class="nist-teaser"
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<h3 class="nist-teaser__title"><a href="/news-events/news/2023/04/nists-nanofab-reopens-its-doors-universities-industry-and-research"><span property="schema:name">NIST’s NanoFab Reopens its Doors to Universities, Industry, and Research Institutions</span>
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<div class="daterange"><time datetime="2023-04-03T12:00:00Z">April 3, 2023</time>
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<div property="schema:text" class="text-with-summary"> In the Lilliputian world of nanofabrication, where billions of microscopic circuit elements are sculpted or imprinted on a fingernail-sized silicon chip
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about="/feature-stories/nanofabulous-experience-internship-nists-nanofab-provides-vital-training-engineers" class="nist-teaser"
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<div class="entity-reference"> <a href="/feature-stories/nanofabulous-experience-internship-nists-nanofab-provides-vital-training-engineers" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/2022/12/09/Evan_Cooper_02.JPG?itok=NmEAogqb" width="100" height="75" alt="A person in a white coverall and safety glasses poses standing next to a rack of computers and other devices in a lab. " typeof="foaf:Image" />
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<h3 class="nist-teaser__title"><a href="/feature-stories/nanofabulous-experience-internship-nists-nanofab-provides-vital-training-engineers"><span>A Nanofabulous Experience: Internship at NIST’s NanoFab Provides Vital Training for Engineers and Technicians Entering the Semiconductor Workforce</span>
</a></h3>
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<div class="datetime"><time datetime="2023-01-05T12:00:00Z">January 5, 2023</time>
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<div class="text-with-summary"> NanoFab internships are one of the many ways that NIST and the Department of Commerce are helping to ensure American
</div>
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<article
about="/news-events/news/2020/11/nist-designs-prototype-fuel-gauge-orbit" typeof="schema:Article" class="nist-teaser"
>
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<div class="entity-reference"> <a href="/news-events/news/2020/11/nist-designs-prototype-fuel-gauge-orbit" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/2020/10/16/PIA24105_orig.jpg?itok=QWV5SbLf" width="100" height="56" alt="An artist&#039;s rendition of the Sentinel-6 Michael Freilich spacecraft in orbit above Earth" typeof="foaf:Image" />
</a>
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<h3 class="nist-teaser__title"><a href="/news-events/news/2020/11/nist-designs-prototype-fuel-gauge-orbit"><span property="schema:name">NIST Designs a Prototype Fuel Gauge for Orbit</span>
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<div class="daterange"><time datetime="2020-11-12T12:00:00Z">November 12, 2020</time>
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<div property="schema:text" class="text-with-summary"> Liquids aren’t as well behaved in space as they are on Earth. Inside a spacecraft, microgravity allows liquids to freely slosh and float about. This behavior
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about="/programs-projects/metrology-nanoimprint-lithography" class="nist-teaser"
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<h3 class="nist-teaser__title"><a href="/programs-projects/metrology-nanoimprint-lithography"><span>Metrology for Nanoimprint Lithography</span>
</a></h3>
<div class="nist-teaser__type">
<div class="nist-badge display-inline-block margin-y-1 nist-badge--green boolean">Completed</div>
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<div class="text-with-summary"> Nanoimprint Lithography (NIL) was originally perceived as a versatile, low-cost, and high-resolution patterning alternative for optical lithography in CMOS fabrication. However, it is becoming apparent that NIL has great potential for nanotechnology in general. It is capable of patterning sub-10 nm
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<article
about="/programs-projects/electron-microscopy-carbon-nanotube-composites" class="nist-teaser"
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<div class="entity-reference"> <a href="/programs-projects/electron-microscopy-carbon-nanotube-composites" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/2016/08/25/3d_cnts_icon.jpg?itok=jcFfuSIu" width="99" height="100" alt="Three-dimensional view of carbon nanostructures grown on the surface of a glass fiber" typeof="foaf:Image" />
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<h3 class="nist-teaser__title"><a href="/programs-projects/electron-microscopy-carbon-nanotube-composites"><span>Electron Microscopy of Carbon Nanotube Composites</span>
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<div class="nist-badge display-inline-block margin-y-1 nist-badge--blue boolean">Ongoing</div>
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<div class="text-with-summary"> Multi-wall CNTs (MWCNTs) are a common nano-carbon reinforcement material and are frequently dispersed into a polymer matrix to form composites that can be engineered with specific combinations of desirable properties – electrical, thermal, optical and mechanical, etc. However, this
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about="/programs-projects/polymers-next-generation-lithography" class="nist-teaser"
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<div class="entity-reference"> <a href="/programs-projects/polymers-next-generation-lithography" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/mml/msed/functional_polymer/lithofigure_1_1.jpg?itok=ZgZU2FPO" width="100" height="55" typeof="foaf:Image" />
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<h3 class="nist-teaser__title"><a href="/programs-projects/polymers-next-generation-lithography"><span>Polymers for Next-Generation Lithography</span>
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<div class="nist-badge display-inline-block margin-y-1 nist-badge--green boolean">Completed</div>
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<div class="nist-teaser__content">
<div class="text-with-summary"> We work closely with the semiconductor industry to develop and apply measurements with high-spatial and chemically-specific resolution to elucidate the critical materials properties and process kinetics at nanometer scales that are needed to advance next-generation photolithography, including both
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<article
about="/programs-projects/single-molecule-fluorescence-measurements-nanoscale-proton-distributions" class="nist-teaser"
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<div class="entity-reference"> <a href="/programs-projects/single-molecule-fluorescence-measurements-nanoscale-proton-distributions" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/cnst/nrg/single_particle_flourescence-rhmu_web.jpg?itok=SqtJo69B" width="100" height="100" alt="Raw PALM fluorescence image" typeof="foaf:Image" />
</a>
</div>
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<header>
<h3 class="nist-teaser__title"><a href="/programs-projects/single-molecule-fluorescence-measurements-nanoscale-proton-distributions"><span>Single Molecule Fluorescence Measurements of Nanoscale Proton Distributions in Photoresist</span>
</a></h3>
<div class="nist-teaser__type">
<div class="nist-badge display-inline-block margin-y-1 nist-badge--green boolean">Completed</div>
</div>
</header>
<div class="nist-teaser__content">
<div class="text-with-summary"> Modern photoresists use a process known as chemical amplification to improve their sensitivity. Each incoming photon generates an acid molecule which then diffuses in the photoresist and catalytically causes chemical changes in the resist that result in the formation of an image. The number of
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about="/publications/x-ray-computed-tomography-flaw-phantom-development-stepper-photolithography-and-deep" class="nist-teaser"
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<h3 class="nist-teaser__title"><a href="/publications/x-ray-computed-tomography-flaw-phantom-development-stepper-photolithography-and-deep"><span>X-ray computed tomography flaw phantom development: stepper photolithography and deep reactive ion etching: Fabrication and reference measurements</span>
</a></h3>
<div class="nist-teaser__date">
<div class="daterange"><time datetime="2025-02-18T12:00:00Z">February 18, 2025</time>
</div>
</div>
<div class="nist-teaser__type">
<div class="nist-field nist-field--label-inline text-long">
<div class="nist-field__label">Author(s)</div>
<div class="nist-field__item"><span class="nist-author">Felix Kim</span>, <span class="nist-author">Sarah Robinson</span>, <span class="nist-author">Nikolai Klimov</span>, <span class="nist-author">John Henry J. Scott</span></div>
</div>
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<div class="nist-teaser__content">
<div class="text-with-summary"> Stepper photolithography combined with deep reactive ion etching was used to generate controlled flaws to assess X-ray computed tomography (XCT) flaw
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about="/publications/defining-chi-block-copolymer-lithography" class="nist-teaser"
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<h3 class="nist-teaser__title"><a href="/publications/defining-chi-block-copolymer-lithography"><span>Defining Chi for Block Copolymer Lithography</span>
</a></h3>
<div class="nist-teaser__date">
<div class="daterange"><time datetime="2023-01-11T12:00:00Z">January 11, 2023</time>
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</div>
<div class="nist-teaser__type">
<div class="nist-field nist-field--label-inline text-long">
<div class="nist-field__label">Author(s)</div>
<div class="nist-field__item">Whitney Loo, Hongbo Feng, Thomas Ferron, Ricardo Ruiz, <span class="nist-author">Daniel Sunday</span>, Paul Nealey</div>
</div>
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</header>
<div class="nist-teaser__content">
<div class="text-with-summary"> Block copolymer lithography, such as directed self-assembly, requires the design of nanostructured block copolymers with precise values of segregation strength
</div>
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<article
about="/publications/unmasking-resolution-throughput-tradespace-focused-ion-beam-machining" class="nist-teaser"
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<h3 class="nist-teaser__title"><a href="/publications/unmasking-resolution-throughput-tradespace-focused-ion-beam-machining"><span>Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining</span>
</a></h3>
<div class="nist-teaser__date">
<div class="daterange"><time datetime="2022-08-21T12:00:00Z">August 21, 2022</time>
</div>
</div>
<div class="nist-teaser__type">
<div class="nist-field nist-field--label-inline text-long">
<div class="nist-field__label">Author(s)</div>
<div class="nist-field__item"><span class="nist-author">Andrew Madison</span>, <span class="nist-author">John S. Villarrubia</span>, <span class="nist-author">Kuo-Tang Liao</span>, <span class="nist-author">Craig R. Copeland</span>, <span class="nist-author">Joshua Schumacher</span>, <span class="nist-author">Kerry Siebein</span>, <span class="nist-author">Robert Ilic</span>, <span class="nist-author">James Alexander Liddle</span>, <span class="nist-author">Samuel M. Stavis</span></div>
</div>
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<div class="nist-teaser__content">
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</div>
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about="/publications/phidl-python-based-layout-and-geometry-creation-nanolithography" class="nist-teaser"
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<h3 class="nist-teaser__title"><a href="/publications/phidl-python-based-layout-and-geometry-creation-nanolithography"><span>PHIDL: Python-based layout and geometry creation for nanolithography</span>
</a></h3>
<div class="nist-teaser__date">
<div class="daterange"><time datetime="2021-09-27T12:00:00Z">September 27, 2021</time>
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<div class="nist-field nist-field--label-inline text-long">
<div class="nist-field__label">Author(s)</div>
<div class="nist-field__item"><span class="nist-author">Adam McCaughan</span>, <span class="nist-author">Alexander N. Tait</span>, <span class="nist-author">Sonia Buckley</span>, <span class="nist-author">Jeff Chiles</span>, <span class="nist-author">Jeff Shainline</span>, <span class="nist-author">Sae Woo Nam</span>, Dylan M. Oh</div>
</div>
</div>
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<div class="nist-teaser__content">
<div class="text-with-summary"> Computer-aided design (CAD) has become a critical element in the creation of nanopatterned structures and devices. In particular, with the increased adoption of
</div>
</div>
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</article>
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about="/laboratories/tools-instruments/nanofab-tool-suss-microtec-maba6-gen4-mask-aligner" class="nist-teaser"
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<div class="entity-reference"> <a href="/laboratories/tools-instruments/nanofab-tool-suss-microtec-maba6-gen4-mask-aligner" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/2024/05/15/Suss%20MicroTec%20MA-BA6%20Gen4%20Mask%20Aligner.png?itok=RsJrNLEw" width="69" height="100" alt="Suss MicroTec MA/BA6 Gen4 Mask Aligner" typeof="foaf:Image" />
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<h3 class="nist-teaser__title"><a href="/laboratories/tools-instruments/nanofab-tool-suss-microtec-maba6-gen4-mask-aligner"><span>NanoFab Tool: Suss MicroTec MA/BA6 Gen4 Mask Aligner</span>
</a></h3>
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<div class="nist-teaser__content">
<div class="text-with-summary"> The SUSS MicroTec MA/BA6 contact aligner allows users to align patterns on the front or back of a substrate and to print feature sizes down to 1 µm. The tool
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about="/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-0" class="nist-teaser"
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<div class="entity-reference"> <a href="/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-0" hreflang="en"><img loading="lazy" src="/sites/default/files/styles/thumbnail/public/images/2018/07/10/direct_ebeam_jeol.jpg?itok=gKWEPYZ9" width="66" height="100" alt="Photograph of the JEOL JBX 6300-FS Direct Write Electron Beam Lithography System. " typeof="foaf:Image" />
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<h3 class="nist-teaser__title"><a href="/laboratories/tools-instruments/nanofab-tool-jeol-jbx-6300-fs-direct-write-electron-beam-0"><span>NanoFab Tool: JEOL JBX 6300-FS Direct Write Electron Beam Lithography System</span>
</a></h3>
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<div class="nist-teaser__content">
<div class="text-with-summary"> The JEOL JBX 6300-FS direct write electron beam lithography system allows users to quickly and directly pattern a variety of substrate materials with feature
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