1049 lines
86 KiB
Text
1049 lines
86 KiB
Text
<!DOCTYPE html>
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<html lang="en" dir="ltr" prefix="content: http://purl.org/rss/1.0/modules/content/ dc: http://purl.org/dc/terms/ foaf: http://xmlns.com/foaf/0.1/ og: http://ogp.me/ns# rdfs: http://www.w3.org/2000/01/rdf-schema# schema: http://schema.org/ sioc: http://rdfs.org/sioc/ns# sioct: http://rdfs.org/sioc/types# skos: http://www.w3.org/2004/02/skos/core# xsd: http://www.w3.org/2001/XMLSchema# ">
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<h1 class="nist-page__title">Design of a 3000 pixel transition-edge sensor x-ray spectrometer for microcircuit tomography</h1>
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<div class="nist-field__item"><time datetime="2021-08-01T12:00:00Z">August 1, 2021</time>
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<h3 class="nist-field__label">Author(s)</h3>
|
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<div class="nist-field__item"><span class="nist-author">Paul Szypryt</span>, <span class="nist-author">Douglas Bennett</span>, William J. Boone, Amber L. Dagel, G Dalton, <span class="nist-author">William Doriese</span>, <span class="nist-author">Malcolm Durkin</span>, <span class="nist-author">Joseph Fowler</span>, <span class="nist-author">Edward Garboczi</span>, Jonathon D. Gard, <span class="nist-author">Gene Hilton</span>, <span class="nist-author">Jozsef Imrek</span>, E S. Jimenez, <span class="nist-author">Vincent Y. Kotsubo</span>, K Larson, <span class="nist-author">Zachary H. Levine</span>, <span class="nist-author">John Mates</span>, D McArthur, <span class="nist-author">Kelsey Morgan</span>, <span class="nist-author">Nathan J. Nakamura</span>, <span class="nist-author">Galen O'Neil</span>, <span class="nist-author">Nathan Ortiz</span>, <span class="nist-author">Christine G. Pappas</span>, <span class="nist-author">Carl Reintsema</span>, <span class="nist-author">Dan Schmidt</span>, <span class="nist-author">Daniel Swetz</span>, K R. Thompson, <span class="nist-author">Joel Ullom</span>, C Walker, Joel C. Weber, <span class="nist-author">Abigail Wessels</span>, J W. Wheeler</div>
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class="nist-block nist-block--no-margin"
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<div class="text-with-summary">
|
||
<h3>Abstract</h3>
|
||
Feature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer. Our approach uses the highly focused SEM electron beam to generate a small x-ray generation region in a carefully designed target layer that is placed over the sample being tested. With the high collection efficiency and resolving power of a TES spectrometer, we can isolate x-rays generated in the target from background and trace their paths through regions of interest in the sample layers, providing information about the various materials along the x-ray paths through their attenuation functions. We have recently demonstrated our approach using a 240 Mo/Cu bilayer TES prototype instrument on a simplified test sample containing features with sizes of ∼1 μm. Currently, we are designing and building a 3000 Mo/Au bilayer TES spectrometer upgrade, which is expected to improve the imaging speed by factor of up to 60 through a combination of increased detector number and detector speed.
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|
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<div class="nist-field__label">Citation</div>
|
||
<div class="nist-field__item">IEEE Transactions on Applied Superconductivity</div>
|
||
</div>
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class="nist-block nist-block--no-margin"
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<div class="nist-field__label">Volume</div>
|
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<div class="nist-field__item">31</div>
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<div class="nist-field__item">5</div>
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class="nist-block nist-block--no-margin"
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|
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<div class="nist-field__items">
|
||
<div class="nist-field__item"><a href="https://dx.doi.org/10.1109/TASC.2021.3052723" target="_blank">https://dx.doi.org/10.1109/TASC.2021.3052723</a></div>
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|
||
<h3 class="nist-field__label">Keywords</h3>
|
||
<div class="nist-field__item">Computed tomography, integrated circuit measurements, scanning electron microscopy, transition-edge sensors</div>
|
||
</div>
|
||
|
||
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<a href="/topic-terms/superconducting-electronics" hreflang="en">Superconducting electronics</a> and <a href="/topic-terms/sensors" hreflang="en">Sensors</a></div>
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class="nist-block__title"
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>Citation</h2>
|
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<div>
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<div class="js-view-dom-id-d30e6e3096c23342f72d91d6443362a86bd3150161dc2c69bad8ee4a9afa3069">
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|
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|
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|
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|
||
<article class="bibcite-reference">
|
||
<div class="bibcite-citation">
|
||
Szypryt, P.
|
||
, Bennett, D.
|
||
, Boone, W.
|
||
, Dagel, A.
|
||
, Dalton, G.
|
||
, Doriese, W.
|
||
, Durkin, M.
|
||
, Fowler, J.
|
||
, Garboczi, E.
|
||
, Gard, J.
|
||
, Hilton, G.
|
||
, Imrek, J.
|
||
, Jimenez, E.
|
||
, Kotsubo, V.
|
||
, Larson, K.
|
||
, , Z.
|
||
, Mates, J.
|
||
, McArthur, D.
|
||
, Morgan, K.
|
||
, Nakamura, N.
|
||
, O'Neil, G.
|
||
, Ortiz, N.
|
||
, Pappas, C.
|
||
, Reintsema, C.
|
||
, Schmidt, D.
|
||
, Swetz, D.
|
||
, Thompson, K.
|
||
, Ullom, J.
|
||
, Walker, C.
|
||
, Weber, J.
|
||
, Wessels, A.
|
||
and Wheeler, J.
|
||
|
||
(2021),
|
||
Design of a 3000 pixel transition-edge sensor x-ray spectrometer for microcircuit tomography, IEEE Transactions on Applied Superconductivity, [online], https://dx.doi.org/10.1109/TASC.2021.3052723, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=931371
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