943 lines
80 KiB
Text
943 lines
80 KiB
Text
<!DOCTYPE html>
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<html lang="en" dir="ltr" prefix="content: http://purl.org/rss/1.0/modules/content/ dc: http://purl.org/dc/terms/ foaf: http://xmlns.com/foaf/0.1/ og: http://ogp.me/ns# rdfs: http://www.w3.org/2000/01/rdf-schema# schema: http://schema.org/ sioc: http://rdfs.org/sioc/ns# sioct: http://rdfs.org/sioc/types# skos: http://www.w3.org/2004/02/skos/core# xsd: http://www.w3.org/2001/XMLSchema# ">
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<head>
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<h1 class="nist-page__title">Additive-Containing Rinses for LER and Defectivity Control During High-Resolution Resist Patterning</h1>
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<div class="nist-field__label">Published</div>
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<div class="nist-field__item"><time datetime="2021-10-12T12:00:00Z">October 12, 2021</time>
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<h3 class="nist-field__label">Author(s)</h3>
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<div class="nist-field__item">D L. Goldfarb, S D. Burns, M Angelopolous, S Skordas, R L. Burns, M C. Lawson, C J. Brodsky, V Vishnu, <span class="nist-author">E Jablonski</span>, <span class="nist-author">Vivek Prabhu</span>, <span class="nist-author">Ronald L. Jones</span>, <span class="nist-author">B D. Vogt</span>, <span class="nist-author">Christopher Soles</span>, <span class="nist-author">Eric K. Lin</span>, <span class="nist-author">Wen-Li Wu</span></div>
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<div class="text-with-summary">
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<h3>Abstract</h3>
|
||
The addition of a surface conditioning agent to the de-ionized water rinse used to quench the photoresist development process is an attractive methodology that can afford a controlled decrease in resist line edge roughness (LER) or a reduction in defectivity levels, during lithographic patterning. The use of additive-containing rinses involves the interfacial adsorption of the surface-active material (e.g. ionic surfactants, neutral polymers, polyelectrolytes) and/or its penetration into the patterned resist structure, which can be held responsible for polymer chain relaxation and reorganization within the resist matrix, resulting in reduced LER. The non-specific adsorption process can also lead to the creation of repulsive (electrostatic or steric) forces between additive-coated surfaces, thus allowing for particulate stabilization in the rinse liquid and the minimization of defects. In this study, LER improvement (8 % to 16 %) induced by an organic salt and defectivity reduction (ca.= 100) created by a polyelectrolyte contained in the rinse liquid are demonstrated in 193 nm resist systems. Also, additive adsorption to a 193 nm resist surface is monitored using a quartz crystal microbalance (QCM), while the repulsive force created between additive-coated surfaces is detected using atomic force microscopy (AFM) and the presence of residual additive is quantified using total x-ray reflection fluorescence (TXRF), near edge x-ray absorption fine structure (NEXAFS) and contact angle measurements. The experimental evidence provided supports the proposed mechanisms leading to LER and defectivity improvement.
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<div class="nist-field__label">Citation</div>
|
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<div class="nist-field__item">Journal of Microlithography Microfabrication and Microsystems</div>
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<h3 class="nist-field__label">Keywords</h3>
|
||
<div class="nist-field__item">adsorption, LER, line edge roughness, resist defetivity, rinse additive, surface conditioning, surfactants</div>
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<article class="bibcite-reference">
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<div class="bibcite-citation">
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Goldfarb, D.
|
||
, Burns, S.
|
||
, Angelopolous, M.
|
||
, Skordas, S.
|
||
, Burns, R.
|
||
, Lawson, M.
|
||
, Brodsky, C.
|
||
, Vishnu, V.
|
||
, Jablonski, E.
|
||
, Prabhu, V.
|
||
, Jones, R.
|
||
, Vogt, B.
|
||
, Soles, C.
|
||
, Lin, E.
|
||
and Wu, W.
|
||
|
||
(2021),
|
||
Additive-Containing Rinses for LER and Defectivity Control During High-Resolution Resist Patterning, Journal of Microlithography Microfabrication and Microsystems
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(Accessed March 4, 2025)
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Created October 12, 2021
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