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|
<div class="usa-header__right grid-row flex-auto">
|
|||
|
|
<div class="grid-col-fill nist-header__search-group">
|
|||
|
|
|
|||
|
|
<form class="usa-search usa-search--small"
|
|||
|
|
accept-charset="UTF-8"
|
|||
|
|
action="/search"
|
|||
|
|
id="search_form"
|
|||
|
|
method="get">
|
|||
|
|
<div role="search">
|
|||
|
|
<label class="usa-sr-only" for="search-form">Search NIST</label>
|
|||
|
|
<input class="usa-input" id="search-form" type="search" name="s" placeholder="Search NIST" required="" maxlength="128">
|
|||
|
|
<button class="usa-button" type="submit"><img src="/libraries/nist-component-library/dist/img/usa-icons-bg/search--white.svg" class="usa-search__submit-icon" alt="Search"></button>
|
|||
|
|
</div>
|
|||
|
|
</form>
|
|||
|
|
</div>
|
|||
|
|
<div class="grid-col-auto padding-left-1">
|
|||
|
|
<button class="usa-menu-btn">Menu</button>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
<nav aria-label="Primary navigation" class="usa-nav">
|
|||
|
|
<div class="usa-nav__inner">
|
|||
|
|
<button class="usa-nav__close">Close</button>
|
|||
|
|
<ul class="usa-nav__primary usa-accordion">
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<a class="usa-nav__link" href="/publications">Publications</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-2"><span>What We Do</span></button>
|
|||
|
|
<div id="primary_menu-2" class="usa-nav__submenu usa-megamenu">
|
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|
|
<div class="grid-row">
|
|||
|
|
<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/topics" class="usa-nav__link">All Topics</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/advanced-communications" class="usa-nav__link">Advanced communications</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/artificial-intelligence" class="usa-nav__link">Artificial intelligence</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/bioscience" class="usa-nav__link">Bioscience</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/buildings-construction" class="usa-nav__link">Buildings and construction</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/chemistry" class="usa-nav__link">Chemistry</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/cybersecurity" class="usa-nav__link">Cybersecurity</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/electronics" class="usa-nav__link">Electronics</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/energy" class="usa-nav__link">Energy</a>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/environment" class="usa-nav__link">Environment</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/fire" class="usa-nav__link">Fire</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/forensic-science" class="usa-nav__link">Forensic science</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/health" class="usa-nav__link">Health</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/information-technology" class="usa-nav__link">Information technology</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/infrastructure" class="usa-nav__link">Infrastructure</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/manufacturing" class="usa-nav__link">Manufacturing</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/materials" class="usa-nav__link">Materials</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/mathematics-statistics" class="usa-nav__link">Mathematics and statistics</a>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/metrology" class="usa-nav__link">Metrology</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/nanotechnology" class="usa-nav__link">Nanotechnology</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/neutron-research" class="usa-nav__link">Neutron research</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/performance-excellence" class="usa-nav__link">Performance excellence</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/physics" class="usa-nav__link">Physics</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/public-safety" class="usa-nav__link">Public safety</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/quantum-information-science" class="usa-nav__link">Quantum information science</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/resilience" class="usa-nav__link">Resilience</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/standards" class="usa-nav__link">Standards</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/transportation" class="usa-nav__link">Transportation</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-3"><span>Labs & Major Programs</span></button>
|
|||
|
|
<div id="primary_menu-3" class="usa-nav__submenu usa-megamenu">
|
|||
|
|
<div class="grid-row">
|
|||
|
|
<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/adlp" class="usa-nav__link">Assoc Director of Laboratory Programs</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/laboratories" class="usa-nav__link">Laboratories</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/ctl" class="usa-nav__link">Communications Technology Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/el" class="usa-nav__link">Engineering Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/itl" class="usa-nav__link">Information Technology Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/mml" class="usa-nav__link">Material Measurement Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml" class="usa-nav__link">Physical Measurement Laboratory</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/user-facilities" class="usa-nav__link">User Facilities</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/ncnr" class="usa-nav__link">NIST Center for Neutron Research</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/cnst" class="usa-nav__link">CNST NanoFab</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/labs-major-programs/research-test-beds" class="usa-nav__link">Research Test Beds</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/laboratories/projects-programs" class="usa-nav__link">Research Projects</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/laboratories/tools-instruments" class="usa-nav__link">Tools & Instruments</a>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/major-programs" class="usa-nav__link">Major Programs</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/baldrige" class="usa-nav__link">Baldrige Performance Excellence Program</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/chips" class="usa-nav__link">CHIPS for America Initiative</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/mep" class="usa-nav__link">Manufacturing Extension Partnership (MEP)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/oam" class="usa-nav__link">Office of Advanced Manufacturing</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/spo" class="usa-nav__link">Special Programs Office</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/tpo" class="usa-nav__link">Technology Partnerships Office</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-4"><span>Services & Resources</span></button>
|
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|
|
<div id="primary_menu-4" class="usa-nav__submenu usa-megamenu">
|
|||
|
|
<div class="grid-row">
|
|||
|
|
<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/content/standards-measurements" class="usa-nav__link">Standards and Measurements</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="/calibrations" class="usa-nav__link">Calibration Services</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/nvlap" class="usa-nav__link">Laboratory Accreditation (NVLAP)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/nist-quality-system" class="usa-nav__link">Quality System</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/srm" class="usa-nav__link">Standard Reference Materials (SRMs)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/sri" class="usa-nav__link">Standard Reference Instruments (SRIs)</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/standardsgov" class="usa-nav__link">Standards.gov</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml/time-and-frequency-division/time-services" class="usa-nav__link">Time Services</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml/owm" class="usa-nav__link">Office of Weights and Measures</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/services-resources/software" class="usa-nav__link">Software</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/data" class="usa-nav__link">Data</a>
|
|||
|
|
<ul class="usa-nav__submenu-list">
|
|||
|
|
<li>
|
|||
|
|
<a href="https://webbook.nist.gov/chemistry/" class="usa-nav__link">Chemistry WebBook</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="https://nvd.nist.gov/" class="usa-nav__link">National Vulnerability Database</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/pml/productsservices/physical-reference-data" class="usa-nav__link">Physical Reference Data</a>
|
|||
|
|
</li>
|
|||
|
|
<li>
|
|||
|
|
<a href="/srd" class="usa-nav__link">Standard Reference Data (SRD)</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="https://shop.nist.gov/" class="usa-nav__link">Storefront</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/tpo" class="usa-nav__link">License & Patents</a>
|
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|
|
</li>
|
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|
|
</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="https://csrc.nist.gov/" class="usa-nav__link">Computer Security Resource Center (CSRC)</a>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__submenu-item">
|
|||
|
|
<a href="/nist-research-library" class="usa-nav__link">NIST Research Library</a>
|
|||
|
|
</li>
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</li>
|
|||
|
|
<li class="usa-nav__primary-item">
|
|||
|
|
<button class="usa-accordion__button usa-nav__link" aria-expanded="false" aria-controls="primary_menu-5"><span>News & Events</span></button>
|
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|
|
<div id="primary_menu-5" class="usa-nav__submenu usa-megamenu">
|
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|
|
<div class="grid-row">
|
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|
|
<div class="tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/news-events/news" class="usa-nav__link">News</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/news-events/events" class="usa-nav__link">Events</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/blogs" class="usa-nav__link">Blogs</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/feature-stories" class="usa-nav__link">Feature Stories</a>
|
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|
|
</li>
|
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|
|
<li class="usa-nav__submenu-item">
|
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|
|
<a href="/awards" class="usa-nav__link">Awards</a>
|
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|
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</li>
|
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|
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</ul></div><div class="column-break tablet:grid-col-fill"><ul class="usa-nav__submenu-list">
|
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|
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<h1 class="nist-page__title">Optics contamination studies in support of high-throughput EUV lithography tools</h1>
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<div class="nist-field__label">Published</div>
|
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<div class="nist-field__item"><time datetime="2011-03-25T12:00:00Z">March 25, 2011</time>
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|
|||
|
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<div class="nist-field__item"><span class="nist-author">Shannon B. Hill</span>, <span class="nist-author">Fardina Asikin</span>, <span class="nist-author">Lee J. Richter</span>, <span class="nist-author">Steven E. Grantham</span>, <span class="nist-author">Charles S. Tarrio</span>, <span class="nist-author">Thomas B. Lucatorto</span>, Sergiy Yulin, Mark Schurmann, Viatcheslav Nesterenko, Torsten Feigl</div>
|
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<div class="text-with-summary">
|
|||
|
|
<h3>Abstract</h3>
|
|||
|
|
We report on optics contamination rates induced by exposure to broad-bandwidth, high-intensity EUV radiation peaked near 8 nm in a new beamline at the NIST synchrotron. The peak intensity of 50 mW/mm2 allows extension of previous investigations of contamination by in-band 13.5 nm radiation at intensities an order of magnitude lower. We report non-linear pressure and intensity scaling of the contamination rates which is consistent with the earlier lower-intensity studies. The magnitude of the contamination rate per unit EUV dose, however, was found to be significantly lower for the lower wavelength exposures. We also report an apparent dose-dependent correlation between the thicknesses as measured by spectroscopic ellipsometry and x-ray photoelectron spectroscopy for the carbon deposits created using the higher doses available on the new beamline. It is proposed that this is due to different sensitivities of the metrologies to variations in the density of the deposited C induced by prolonged EUV irradiation.
|
|||
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<div class="nist-field nist-field--label-inline string">
|
|||
|
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<div class="nist-field__label">Proceedings Title</div>
|
|||
|
|
<div class="nist-field__item">EUV Lithography 2011</div>
|
|||
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</div>
|
|||
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|
|||
|
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<div class="nist-field__label">Conference Dates</div>
|
|||
|
|
<div class="nist-field__item">February 27-March 3, 2011</div>
|
|||
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</div>
|
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|
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|
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|
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<div class="nist-field nist-field--label-inline string">
|
|||
|
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<div class="nist-field__label">Conference Location</div>
|
|||
|
|
<div class="nist-field__item">San Jose, CA</div>
|
|||
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</div>
|
|||
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|
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|
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|
|||
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<div class="nist-field nist-field--label-inline string">
|
|||
|
|
<div class="nist-field__label">Conference Title</div>
|
|||
|
|
<div class="nist-field__item">2011 Advanced Lithography</div>
|
|||
|
|
</div>
|
|||
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<div class="nist-field nist-field--label-inline nist-field--link-list entity-reference">
|
|||
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<div class="nist-field__label">Pub Type</div>
|
|||
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<div class="nist-field__item">Conferences</div>
|
|||
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|
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<div class="nist-field nist-field--label-above nist-field--link-list link">
|
|||
|
|
<h3 class="nist-field__label">Download Paper</h3>
|
|||
|
|
<div class="nist-field__items">
|
|||
|
|
<div class="nist-field__item"><a href="https://doi.org/10.1117/12.879852" target="_blank">https://doi.org/10.1117/12.879852</a></div>
|
|||
|
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</div>
|
|||
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|
|||
|
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<div class="nist-field nist-field--label-above string-long">
|
|||
|
|
<h3 class="nist-field__label">Keywords</h3>
|
|||
|
|
<div class="nist-field__item">Extreme ultraviolet lithography, EUVL, multilayer optics, optics lifetime, optics contamination, ellipsometry, carbon deposition, photochemistry</div>
|
|||
|
|
</div>
|
|||
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|
|||
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|
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|
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|
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|
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|
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|
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|
|
<!-- nist-index-ignore-start -->
|
|||
|
|
<div data-elastic-exclude="" class="nist-tags">
|
|||
|
|
<a href="/topic-terms/semiconductors" hreflang="en">Semiconductors</a>, <a href="/topic-terms/lithography" hreflang="en">Lithography</a> and <a href="/topic-terms/condensed-matter" hreflang="en">Condensed matter</a></div>
|
|||
|
|
<!-- nist-index-ignore-end -->
|
|||
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|
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|
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|
|||
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|
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|
|||
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class="views-element-container nist-block"
|
|||
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|
|||
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|
|||
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<h2
|
|||
|
|
class="nist-block__title"
|
|||
|
|
>Citation</h2>
|
|||
|
|
|
|||
|
|
<div>
|
|||
|
|
<div class="js-view-dom-id-04b751536c5775e4f6275bdee17cc01a1970b5ab67c3151e5f16a31330300544">
|
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|
|||
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|
|
|||
|
|
<article class="bibcite-reference">
|
|||
|
|
<div class="bibcite-citation">
|
|||
|
|
Hill, S.
|
|||
|
|
, Asikin, F.
|
|||
|
|
, Richter, L.
|
|||
|
|
, Grantham, S.
|
|||
|
|
, Tarrio, C.
|
|||
|
|
, Lucatorto, T.
|
|||
|
|
, Yulin, S.
|
|||
|
|
, Schurmann, M.
|
|||
|
|
, Nesterenko, V.
|
|||
|
|
and Feigl, T.
|
|||
|
|
|
|||
|
|
(2011),
|
|||
|
|
Optics contamination studies in support of high-throughput EUV lithography tools, EUV Lithography 2011, San Jose, CA, [online], https://doi.org/10.1117/12.879852
|
|||
|
|
(Accessed March 4, 2025)
|
|||
|
|
</div>
|
|||
|
|
|
|||
|
|
<div class="usa-accordion usa-accordion--bordered bibcite-links margin-top-2" aria-multiselectable="false">
|
|||
|
|
<h2 class="usa-accordion__heading">
|
|||
|
|
<button class="usa-accordion__button"
|
|||
|
|
aria-expanded="false"
|
|||
|
|
aria-controls="citation_formats">
|
|||
|
|
Additional citation formats
|
|||
|
|
</button>
|
|||
|
|
</h2>
|
|||
|
|
<div id="citation_formats" class="usa-accordion__content">
|
|||
|
|
<div class="bibcite-links">
|
|||
|
|
<ul>
|
|||
|
|
<li><a href="http://dx.doi.org/https://doi.org/10.1117/12.879852">DOI</a></li>
|
|||
|
|
<li><a href="https://scholar.google.com/scholar?btnG=Search%2BScholar&as_q=%22Optics%2Bcontamination%2Bstudies%2Bin%2Bsupport%2Bof%2Bhigh-throughput%2BEUV%2Blithography%2Btools%22&as_occt=any&as_epq=&as_oq=&as_eq=&as_publication=&as_ylo=&as_yhi=&as_sdtAAP=1&as_sdtp=1">Google Scholar</a></li>
|
|||
|
|
<li><a href="/bibcite/export/bibtex/bibcite_reference/11316">BibTeX</a></li>
|
|||
|
|
<li><a href="/bibcite/export/ris/bibcite_reference/11316">RIS</a></li>
|
|||
|
|
|
|||
|
|
</ul>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</div>
|
|||
|
|
</article>
|
|||
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|
|||
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|
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|
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|
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|
|||
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|
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|
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|
|||
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|
|||
|
|
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|
|||
|
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class="nist-block"
|
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Created March 25, 2011, Updated November 10, 2018
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